Biomedical Microdevices

, Volume 9, Issue 6, pp 939–949 | Cite as

Ultraminiature encapsulated accelerometers as a fully implantable sensor for implantable hearing aids

  • Woo-Tae Park
  • Kevin N. O’Connor
  • Kuan-Lin Chen
  • Joseph R. MallonJr.
  • Toshiki Maetani
  • Parmita Dalal
  • Rob N. Candler
  • Vipin Ayanoor-Vitikkate
  • Joseph B. RobersonJr.
  • Sunil Puria
  • Thomas W. Kenny
Article

Abstract

Experiments were conducted to evaluate a silicon accelerometer as an implantable sound sensor for implantable hearing aids. The main motivation of this study is to find an alternative sound sensor that is implantable inside the body, yet does not suffer from the signal attenuation from the body. The merit of the accelerometer sensor as a sound sensor will be that it will utilize the natural mechanical conduction in the middle ear as a source of the vibration. With this kind of implantable sound sensor, a totally implantable hearing aid is feasible. A piezoresistive silicon accelerometer that is completely encapsulated with a thin silicon film and long flexible flex-circuit electrical cables were used for this study. The sensor is attached on the middle ear ossicles and measures the vibration transmitted from the tympanic membrane due to the sound in the ear canal. In this study, the sensor is fully characterized on a human cadaveric temporal bone preparation.

Keywords

Accelerometer Implantable hearing aids Epi-poly encapsulation Flex-circuit 

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Copyright information

© Springer Science+Business Media, LLC 2007

Authors and Affiliations

  • Woo-Tae Park
    • 1
  • Kevin N. O’Connor
    • 2
  • Kuan-Lin Chen
    • 1
  • Joseph R. MallonJr.
    • 1
  • Toshiki Maetani
    • 2
  • Parmita Dalal
    • 1
  • Rob N. Candler
    • 1
  • Vipin Ayanoor-Vitikkate
    • 1
  • Joseph B. RobersonJr.
    • 2
    • 3
  • Sunil Puria
    • 1
    • 2
  • Thomas W. Kenny
    • 1
  1. 1.Departments of Mechanical and Electrical EngineeringStanford UniversityStanfordUSA
  2. 2.Department of Otolaryngology—Head and Neck SurgeryStanford UniversityStanfordUSA
  3. 3.California Ear InstituteEast Palo AltoUSA

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