Design and implementation of an optimised wireless pressure sensor for biomedical application



This paper presents design and implementation of a wireless pressure sensor system for biomedical application. The system consists of a front-end Micro-Electro- Mechanical System (MEMS) sensing capacitor along with an optimised MEMS-based oscillator for signal conditioning circuit. In this design, vertical fringed comb capacitor is employed due to the advantages of smaller area, higher linearity and larger full scale change in capacitance compared to parallel plate counterparts. The MEMS components are designed in Coventorware design suite and their Verilog-A models are extracted and then imported to Cadence for co-simulation with the CMOS section of the system using AMI 0.6-micron CMOS process. In this paper, an optimisation method to significantly reduce the system power consumption while maintaining the system performance sufficient is also proposed. A phase noise optimisation approach is based on the algorithm to limit the oscillator tail current. Results show that for the pressure range of 0–300 mmHg the device capacitance range of 1.31 pF – 1.98 pF is achieved which results in a frequency sweep of 2.54 GHz – 1.95 GHz. Results also indicate that a 42% reduction of power consumption is achieved when the optimisation algorithm is applied. This characteristic makes the sensor system a better candidate for wireless biomedical applications where power consumption is the major factor.


MEMS Biomedical sensor Capacitive sensing Co-simulation Vertical fringe capacitor 


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© Springer Science + Business Media, LLC 2006

Authors and Affiliations

  1. 1.Centre for Telecommunications and MicroelectronicsVictoria UniversityVictoriaAustralia

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