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Acta Mechanica Sinica

, Volume 25, Issue 1, pp 1–12 | Cite as

Mechanical and electronic approaches to improve the sensitivity of microcantilever sensors

  • Madhu Santosh Ku Mutyala
  • Deepika Bandhanadham
  • Liu Pan
  • Vijaya Rohini Pendyala
  • Hai-Feng JiEmail author
Review Paper

Abstract

Advances in the field of micro electro mechanical systems and their uses now offer unique opportunities in the design of ultrasensitive analytical tools. The analytical community continues to search for cost-effective, reliable, and even portable analytical techniques that can give reliable and fast response results for a variety of chemicals and biomolecules. Microcantilevers (MCLs) have emerged as a unique platform for label-free chem-sensor or bioassay. Several electronic designs, including piezoresistive, piezoelectric, and capacitive approaches, have been applied to measure the bending or frequency change of the MCLs upon exposure to chemicals. This review summarizes mechanical, fabrication, and electronics approaches to increase the sensitivity of MCL sensors.

Keywords

Microcantilever Sensor MEMS Sensitivity 

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Copyright information

© The Chinese Society of Theoretical and Applied Mechanics and Springer-Verlag GmbH 2009

Authors and Affiliations

  • Madhu Santosh Ku Mutyala
    • 1
  • Deepika Bandhanadham
    • 1
  • Liu Pan
    • 1
  • Vijaya Rohini Pendyala
    • 1
  • Hai-Feng Ji
    • 1
    • 2
    Email author
  1. 1.Institute for MicromanufacturingLouisiana Tech UniversityRustonUSA
  2. 2.Department of ChemistryDrexel UniversityPhiladelphiaUSA

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