An improved bulk acoustic waves chip based on a PDMS bonding layer for high-efficient particle enrichment

Research Paper
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Abstract

In this work, we developed a feasible way to package bulk acoustic waves chip with sandwich structure by inserting a polydimethylsiloxane (PDMS) layer as the adhesive between cover glass and silicon substrate. After spin-coating and curing process, a PDMS layer was formed on one side of the cover glass and then bonded to the silicon substrate with microchannels by oxygen plasma treating. Both simulation and experiment showed that the chip was not leaking and the acoustic waves produced by the piezoelectric transducer could be propagated through the PDMS layer. Finally, a standing wave field was formed in the microchannels. Compared with traditional chip bonded by anodic bonding, simulation results showed that this packaging method did decrease the acoustic pressure in the channel, but the reduction was acceptable. After optimizing the experimental parameters, we successfully aggregated 15-μm silica spheres under a very low input power (21 dBm) at a flow velocity of 1 ml/h, and the enrichment efficiency of silica spheres was greater than 97%.

Keywords

BAWs chip PDMS layer Spin-coating Oxygen plasma treating Standing wave field 

Notes

Acknowledgements

This work was supported by the National Natural Science Foundation of China (No. 81572860) and the National Key R&D Program of China (No. 2017YFF0108600).

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Copyright information

© Springer-Verlag GmbH Germany, part of Springer Nature 2018

Authors and Affiliations

  • Xi Shu
    • 1
  • Huiqin Liu
    • 1
  • Yezi Zhu
    • 1
  • Bo Cai
    • 1
  • Yanxia Jin
    • 2
  • Yongchang Wei
    • 2
  • Fuling Zhou
    • 2
  • Wei Liu
    • 1
  • Shishang Guo
    • 1
  1. 1.Key Laboratory of Artificial Micro- and Nano-structures of Ministry of Education, School of Physics and TechnologyWuhan UniversityWuhanChina
  2. 2.Department of HematologyZhongnan Hospital of Wuhan UniversityWuhanChina

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