A microfluidic device for thermal particle detection
- First Online:
- 599 Downloads
We demonstrate the use of heat to count microscopic particles. A thermal particle detector (TPD) was fabricated by combining a 500-nm-thick silicon nitride membrane containing a thin-film resistive temperature detector with a silicone elastomer microchannel. Particles with diameters of 90 and 200 μm created relative temperature changes of 0.11 and −0.44 K, respectively, as they flowed by the sensor. A first-order lumped thermal model was developed to predict the temperature changes. Multiple particles were counted in series to demonstrate the utility of the TPD as a particle counter.
KeywordsMicrofluidics Particle counting Thermal
- Incropera FP, DeWitt DP (1996) Fundamentals of heat and mass transfer, 4th edn. Wiley, New YorkGoogle Scholar
- Karayacoubian P, Bahrami M, Culham JR (2005) Asymptotic solutions of effective thermal conductivity. In: Proceedings of IMECE 2005. ASME international mechanical engineering congress and exposition. Orlando, Florida, USA, IMECE2005-82734Google Scholar