Pressure-sensitive channel chip for visualization measurement of micro gas flows
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We have developed a new pressure sensing tool named pressure-sensitive channel chip (PSCC) by combining the pressure-sensitive paint (PSP) technique with the poly(dimethylsiloxane) (PDMS) micro-molding technique. The PSP technique based on the oxygen quenching of luminescence is a potential diagnostic tool for pressure measurement of micro gas flows. However, the application of PSP to micro scale measurement is very difficult, because the thickness and the surface roughness of conventional PSPs cannot be neglected compared with the characteristic length of micro channels, and the spatial resolution is not enough for micro scale measurements due to the aggregations of luminophore. PSCC is fabricated with PDMS containing a pressure-sensitive luminophore; thus PSCC is a micro channel which itself works as a pressure “distribution” sensor. A micro converging-diverging nozzle with the throat width of 120 μm was demonstrated. The pressure distribution on the nozzle surface was successfully obtained by PSCC without the shortcomings of conventional PSPs.
KeywordsMicro gas flow Flow visualization Pressure-sensitive channel chip Pressure-sensitive paint
The present work was partially supported by Grant-in-Aid for Scientific Research of the MEXT and JSPS.