Microfluidics and Nanofluidics

, Volume 11, Issue 1, pp 111–117

Fabrication of large-volume microfluidic chamber embedded in glass using three-dimensional femtosecond laser micromachining

Short Communication

DOI: 10.1007/s10404-011-0790-9

Cite this article as:
Ju, Y., Liao, Y., Zhang, L. et al. Microfluid Nanofluid (2011) 11: 111. doi:10.1007/s10404-011-0790-9
  • 438 Downloads

Abstract

We report on fabrication of large-volume, square-shaped microfluidic chamber embedded in glass by scanning a tightly focused femtosecond laser beam inside a porous glass immersed in water. After the hollow structure is created in the porous glass substrate, the fabricated glass sample is post-annealed at 1,050°C during which it can be sintered into a compact glass. By the use of this technique, a 1 mm × 1 mm × 100 μm microchamber connected to four microfluidic channels is created inside the transparent glass substrate, showing that our technique allows for fabrication of not only thin channel structures with arbitrary lengths and configurations, but also hollow structures with infinitely large sizes.

Keywords

Large volume Microfluidic chamber Femtosecond laser Three-dimensional micromachining 

Copyright information

© Springer-Verlag 2011

Authors and Affiliations

  1. 1.State Key Laboratory of High Field Laser Physics, Shanghai Institute of Optics and Fine MechanicsChinese Academy of SciencesShanghaiChina
  2. 2.Key Laboratory of Materials for High Power Laser, Shanghai Institute of Optics and Fine MechanicsChinese Academy of SciencesShanghaiChina
  3. 3.Graduate School of the Chinese Academy of SciencesBeijingChina
  4. 4.Laser Technology LaboratoryRIKEN-Advanced Science InstituteWakoJapan

Personalised recommendations