A new experimental setup for flow rate measurement of gases through microsystems is presented. Its principle is based on two complementary techniques, called droplet tracking method and constant-volume method. Experimental data on helium and argon isothermal flows through rectangular microchannels are presented and compared with computational results based on a continuum model with second-order boundary conditions and on the linearized kinetic BGK equation. A very good agreement is found between theory and experiment for both gases, assuming purely diffuse accommodation at the walls. Also, some experimental data for a binary mixture of monatomic gases are presented and compared with kinetic theory based on the McCormack model.
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The support of the European Community under grant PITN-GA-2008-215504, ‘Gas flows in Micro Electro Mechanical Systems’, and the support of EGIDE under grant PHC-15080QE, ‘Ecoulements types de mélanges gazeux dans les nano et microsystèmes à vocation biologique” are gratefully acknowledged.
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Pitakarnnop, J., Varoutis, S., Valougeorgis, D. et al. A novel experimental setup for gas microflows. Microfluid Nanofluid 8, 57–72 (2010). https://doi.org/10.1007/s10404-009-0447-0
- Rarefied gas flow
- Experimental setup
- Micro flow rate measurement
- Discrete velocity method
- Slip flow
- Transition flow