A novel experimental setup for gas microflows
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A new experimental setup for flow rate measurement of gases through microsystems is presented. Its principle is based on two complementary techniques, called droplet tracking method and constant-volume method. Experimental data on helium and argon isothermal flows through rectangular microchannels are presented and compared with computational results based on a continuum model with second-order boundary conditions and on the linearized kinetic BGK equation. A very good agreement is found between theory and experiment for both gases, assuming purely diffuse accommodation at the walls. Also, some experimental data for a binary mixture of monatomic gases are presented and compared with kinetic theory based on the McCormack model.
KeywordsMicrofluidics Rarefied gas flow Experimental setup Micro flow rate measurement Discrete velocity method Slip flow Transition flow
The support of the European Community under grant PITN-GA-2008-215504, ‘Gas flows in Micro Electro Mechanical Systems’, and the support of EGIDE under grant PHC-15080QE, ‘Ecoulements types de mélanges gazeux dans les nano et microsystèmes à vocation biologique” are gratefully acknowledged.
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