Bonding of soda-lime glass microchips at low temperature
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A simple, low-temperature bonding process is described for the fabrication of soda-lime glass microfluidic chips. Due to its chemical inertness and temperature stability, glass remains a popular material for microfluidic chips despite the advances that have been made with polymer materials. Conventional thermal bonding is performed over the course of 24 h at 600°C and requires a precise temperature-controlled furnace. Here we introduce a simple low-temperature alternative for the high-strength bonding of soda-lime glass wafers based on the use of diluted HF solution in combination with pressure at a temperature of 65°C.
KeywordsSoda-lime glass microchips Pressure-assisted bonding Microchip fabrication
- Nakanishi H, Abe H, Nishimoto T, Arai A (1998) Micro-fabrication and analytical performances of quartz and glass microchips for electrophoresis. Bunseki Kagaku 47:361–368Google Scholar