Optical Review

, Volume 5, Issue 2, pp 83–88 | Cite as

Application of a Phase-grating Beamsplitter in Laser-Processing Indium-Tin-Oxide Films for Liquid Crystal Panels

  • Jun Amako
  • Masami Murai
  • Tomio Sonehara


Array illumination built on a binary phase grating with a green, Q-switched, pulse Nd:YAG laser is used for patterning indium-tin-oxide films into electrodes of liquid crystal display panels. To this end, even-fanout gratings are recursively designed by simulated-annealing algorithm and are realized in quartz glasses by dry etching. While an array of identically intense beam spots strikes the film, a table supporting the film moves in a direction orthogonal to said spots array at a constant speed, forming a large group of equispaced grooves in the film. A machining yield of 1600 mm/s has been attained using a 32×1 grating.

Key words

laser-processing liquid crystal panel phase grating array illumination 


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Copyright information

© The Optical Society of Japan 1998

Authors and Affiliations

  • Jun Amako
    • 1
  • Masami Murai
    • 1
  • Tomio Sonehara
    • 1
  1. 1.Corporate R & DSeiko Epson CorporationNaganoJapan

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