Application of a Phase-grating Beamsplitter in Laser-Processing Indium-Tin-Oxide Films for Liquid Crystal Panels
Array illumination built on a binary phase grating with a green, Q-switched, pulse Nd:YAG laser is used for patterning indium-tin-oxide films into electrodes of liquid crystal display panels. To this end, even-fanout gratings are recursively designed by simulated-annealing algorithm and are realized in quartz glasses by dry etching. While an array of identically intense beam spots strikes the film, a table supporting the film moves in a direction orthogonal to said spots array at a constant speed, forming a large group of equispaced grooves in the film. A machining yield of 1600 mm/s has been attained using a 32×1 grating.
Key wordslaser-processing liquid crystal panel phase grating array illumination
Unable to display preview. Download preview PDF.
- 1.N. Ishiyama: U.S. Patent 5227607 (1993).Google Scholar
- 2.K. Minamida and J. Suehiro: US. Patent 4947023 (1990).Google Scholar
- 3.S. Yahagi, S. Ishida and S. Fujimoto: U.S. Patent 5017755 (1991).Google Scholar
- 4.J. Amako, M. Murai and T. Sonehara: OSA Technical Digest Series Vol. 11, CTuK6 (Optical Society of America, Washington D.C., 1997) p. 99Google Scholar
- 6.J. Jahns, M.M. Downs, M.E. Prise, N. Streibl and S.J. Walker: Opt. Eng. 28 (1989) 1267.Google Scholar
- 7.A. Vasara, M.R. Taghizadeh, J. Tutunen, J. Westerholm, E. Noponen, H. Ichikawa, J.M. Miller, T. Jaakkola and S. Kuisma: Appl. Opt. 31 (1992) 3320.Google Scholar
- 8.R.L. Morrison: J. Opt. Soc. Am. A 9 (1992) 464.Google Scholar