Optical Review

, Volume 25, Issue 2, pp 190–196 | Cite as

Analysis of a new phase and height algorithm in phase measurement profilometry

Regular Paper
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Abstract

Traditional phase measurement profilometry adopts divergent illumination to obtain the height distribution of a measured object accurately. However, the mapping relation between reference plane coordinates and phase distribution must be calculated before measurement. Data are then stored in a computer in the form of a data sheet for standby applications. This study improved the distribution of projected fringes and deducted the phase-height mapping algorithm when the two pupils of the projection and imaging systems are of unequal heights and when the projection and imaging axes are on different planes. With the algorithm, calculating the mapping relation between reference plane coordinates and phase distribution prior to measurement is unnecessary. Thus, the measurement process is simplified, and the construction of an experimental system is made easy. Computer simulation and experimental results confirm the effectiveness of the method.

Keywords

Phase measurement profilometry 3D sensing Phase shift Optical measurement 

Notes

Acknowledgements

This work was supported by the Fundamental Research Funds for the Central Universities (No. 30920140122005), Educational Commission of Jiangsu Province (No. 17KJA460004), Huaian Science and Technology Funds (HAC201701) and Youth Foundation of Huaiyin Normal University (No.13HSQNZ03).

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Copyright information

© The Optical Society of Japan 2018

Authors and Affiliations

  1. 1.Ministerial Key Laboratory of JGMTNanjing University of Science and TechnologyNanjingChina
  2. 2.Jiangsu Key Construction Laboratory of Modern Measurement Technology and Intelligent SystemHuaiyin Normal UniversityHuaianChina

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