Optical Review

, Volume 16, Issue 6, pp 575–577

Impact of an indium oxide/indium-tin oxide mixed structure for GaN-based light-emitting diodes

  • Yi-Jung Liu
  • Chih-Hung Yen
  • Chia-Hao Hsu
  • Kuo-Hui Yu
  • Li-Yang Chen
  • Tsung-Han Tsai
  • Wen-Chau Liu
Letters

Abstract

An interesting GaN-based light emitting diode (LED) using a 50 nm indium oxide (In2O3)/250 nm indium-tin oxide (ITO) mixed structure to replace the commonly used ITO (250 nm) current spreading layer is fabricated and studied. Use of the In2O3 layer could reduce the contact resistance of p-GaN in LEDs. In addition, this highly-resistive In2O3 layer, below the ITO layer could improve the current spreading performance. Experimentally, at room temperature, using this mixed structure, the luminous and EL intensities are enhanced by 17.7 and 17.1%, respectively.

Keywords

GaN light-emitting diode (LED) In2O3 ITO specific contact resistance transparent and conductive oxide (TCO) 

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Copyright information

© The Optical Society of Japan 2009

Authors and Affiliations

  • Yi-Jung Liu
    • 1
  • Chih-Hung Yen
    • 1
  • Chia-Hao Hsu
    • 1
  • Kuo-Hui Yu
    • 1
  • Li-Yang Chen
    • 1
  • Tsung-Han Tsai
    • 1
  • Wen-Chau Liu
    • 1
  1. 1.Institute of Microelectronics, Department of Electrical EngineeringNational Cheng-Kung UniversityTainan, TaiwanRepublic of China

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