Optical Review

, Volume 16, Issue 2, pp 133–140

Opto-mechatronic configurations to maximize dynamic range and optimize resolution of optical instruments

  • Chih-Kung Lee
  • Tsung-Dar Cheng
  • Shu-Sheng Lee
  • Chin-Kai Chang
Regular Papers

DOI: 10.1007/s10043-009-0023-6

Cite this article as:
Lee, CK., Cheng, TD., Lee, SS. et al. OPT REV (2009) 16: 133. doi:10.1007/s10043-009-0023-6

Abstract

We developed a new mechanical configuration which combines various optical techniques to maximize dynamic range and to optimize resolution in optical instruments. We assessed various optical configurations by looking at such variables as electronic signal processing and mechanical construction. Previous configurations developed over the last 10 years are discussed. In our new configuration, we adopted and integrated devices such as a microscopic, an interferometer, an electronic speckle pattern interferometer, and a photon tunneling microscope. We examined the impact of our new configuration on future opto-mechatronic systems design. Our new configuration can be an effective and versatile optical metrology tool for enhancing the performance of MEMS and NEMS devices.

Keywords

interferometry metrology optical systems ESPI Doppler interferometer AVID 

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Copyright information

© The Optical Society of Japan 2009

Authors and Affiliations

  • Chih-Kung Lee
    • 1
    • 2
    • 3
  • Tsung-Dar Cheng
    • 1
  • Shu-Sheng Lee
    • 4
  • Chin-Kai Chang
    • 1
  1. 1.Institute of Applied MechanicsNational Taiwan UniversityTaipeiTaiwan
  2. 2.Engineering Science and Ocean EngineeringNational Taiwan UniversityTaipeiTaiwan
  3. 3.Industrial Technology Research Institute (ITRI)HsinchuTaiwan
  4. 4.Systems Engineering and Naval ArchitectureNational Taiwan Ocean UniversityKeelungTaiwan

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