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Optical Review

, Volume 13, Issue 4, pp 225–227 | Cite as

Electroless Nickel Plating under Continuous Ultrasonic Irradiation to Fabricate a Near-Field Probe Whose Metal Coat Decreases in Thickness toward the Tip

  • Yuichi Saito
  • Shuji Mononobe
  • Motoichi Ohtsu
  • Hideo Honma
Special Section: The 5th Asia-Pacific Conference on Near-Field Optics

Abstract

This paper describes a size-dependent electroless plating method to fabricate a new type of probe with a locally decreasing thickness of metal and a tiny tip size for a combined high resolution shear-force and near-field optical microscope. In this method, the tip size and decreasing thickness profile, which affect the resolution capabilities of the microscopes, are controlled by adding a continuous ultrasonic wave with a frequency of 1 MHz to a nickel plating bath. The probe with a tip radius of curvature of 25 nm was successfully fabricated at an ultrasonic power density of 1.6 W cm−2, its metal thickness gradually decreased from 850 to 20 nm toward the distal tip.

Key words

electroless plating metallization ultrasonic wave optical fiber SNOM NSOM etching non-contact atomic force microscope 

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References

  1. 1.
    Near-Field Optics, ed. D. W. Pohl and D. Coujorn (Kluwer, Dordrecht, 1993) NATO ASI Series E, Vol. 242.Google Scholar
  2. 2.
    Near-Field Nano/Atom Optics and Technology, ed. M. Ohtsu (Springer-Verlag, Tokyo, 1998).Google Scholar
  3. 3.
    S. Mononobe, Y. Saito, M. Ohtsu and H. Honma: Jpn. J. Appl. Phys. 43 (2004) 2862.CrossRefGoogle Scholar

Copyright information

© The Optical Society of Japan 2006

Authors and Affiliations

  • Yuichi Saito
    • 3
  • Shuji Mononobe
    • 1
  • Motoichi Ohtsu
    • 2
  • Hideo Honma
    • 3
  1. 1.Kanagawa Academy of Science and TechnologyTakatsu-ku, KawasakiJapan
  2. 2.Department of Electronics EngineeringUniversity of TokyoHongo, Bunkyo-ku, TokyoJapan
  3. 3.Graduate School of EngineeringKanto Gakuin UniversityMutsuurahigashi, Kanazawa-ku, YokohamaJapan

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