Analytical Designing of Two-Aspherical-Mirror Anastigmats Permitting Practical Misalignments in a Soft-X-Ray Optics
A new analytical method of designing two-aspherical-mirror anastigmats was developed and applied to searching solution groups of soft X-ray microscopes of a large misalignment tolerance. The two-mirror anastigmat configurations were expressed by a practical variable related to pupil obstruction limiting the system throughput. Axial coma and other aberrations caused by a slight decenter of the system were then formulated to represent sensitivity to misalignment. These formulations enabled a global survey of solution groups as demonstrated by a designing example of soft X-ray microscopes with a magnification m = −1/50, which resulted in four solutions more insensitive to misalignment than a standard Schwarzschild optics in the soft X-ray region. Some solutions were also found to have much larger fields of view suitable for high resolution imaging as confirmed by computer ray tracing.
Key wordsanastigmat aspherical mirror misalignment soft X-ray microscope
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- 1.D. Attowood: Soft X-Rays and Extreme Ultraviolet Radiation (Cambridge University Press, Cambridge, 2000) Chap. 9.Google Scholar
- 6.Y. Horikawa, S. Mochimaru, Y. Iketaki and K. Nagai: Proc. SPIE 1720 (1992) 217.Google Scholar
- 7.D. Korsch: Reflective Optics (Academic Press, San Diego, 1991) p. 151.Google Scholar
- 8.Y. Matsui and K. Nariai: Fundamentals of Practical Aberration Theory (World Scientific, Singapore, 1993) Chap. 3.1.4.Google Scholar
- 9.For example, V. N. Mahajan: Optical Imaging and Aberrations (SPIE Press, Washington, 1998) Part 1, Chap. 1.3.7.Google Scholar
- 10.See Chap. 3.2.3 of ref. 8.Google Scholar
- 11.See Chap. 1.2 of ref. 8.Google Scholar
- 12.See Appendix A of ref. 8.Google Scholar
- 16.Y. Matsui: Proc. SPIE 1319 (1990) 604.Google Scholar
- 17.Y. Matsui: Henshin no Sonzaisuru Kougakukei no Sanji no Syusaron (Third order aberration theory for misaligned optics) (Japan Optoelectro-Mechanics Association, Tokyo, 1990) p. 16 [in Japanese].Google Scholar
- 18.See Chap. 8.4 of ref. 7.Google Scholar