Optical Review

, Volume 9, Issue 5, pp 183–185

Broadband Antireflection Subwavelength Gratings for Polymethyl Methacrylate Fabricated with Molding Technique

  • Yoshiaki Kanamori
  • Kazuhiro Hane

DOI: 10.1007/s10043-002-0183-0

Cite this article as:
Kanamori, Y. & Hane, K. OPT REV (2002) 9: 183. doi:10.1007/s10043-002-0183-0


We fabricated a two-dimensional subwavelength grating (SWG) on a polymethyl methacrylate (PMMA) film using a molding technique. A method of fabricating SWGs with high accuracy using a replica technique in an atmospheric environment was proposed. The SWG consisted of tapered gratings with a 200 nm period and a 200 nm deep groove. The reflectivity at wavelengths from 400 nm to 800 nm was measured and compared with the results calculated on the basis of rigorous coupled-wave analysis. At these wavelengths, the reflectivity decreased to approximately half that of the PMMA film.

Key words

subwavelength grating antireflection mold polymethyl methacrylate micromachining rigorous coupled-wave analysis 

Copyright information

© The Optical Society of Japan 2002

Authors and Affiliations

  • Yoshiaki Kanamori
    • 1
  • Kazuhiro Hane
    • 1
  1. 1.Department of Mechatronics and Precision EngineeringTohoku UniversityAoba-ku, SendaiJapan

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