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Microchimica Acta

, Volume 138, Issue 3–4, pp 265–274 | Cite as

Energy Dispersive X-Ray Spectrometry by Microcalorimetry for the SEM

  • Dale Newbury
  • David Wollman
  • Sae Woo Nam
  • Gene Hilton
  • Kent Irwin
  • John Small
  • John Martinis

Abstract.

 Analytical X-ray spectrometry for electron beam instruments has advanced significantly with the development of the microcalorimeter energy dispersive X-ray spectrometer (µcal EDS). The µcal EDS operates by measuring the temperature rise when a single photon is absorbed in a metal target. A cryoelectronic circuit with electrothermal feedback and a superconducting transition edge sensor serves as the thermometer. Spectral resolution approaching 4.5 eV for high energy photons (6000 eV) and 2 eV for low energy photons below 2000 eV has been demonstrated in energy dispersive operation across a photon energy range from 250 eV to 8 keV. Spectra of a variety of materials demonstrate the power of the µcal EDS to solve practical problems while operating on a scanning electron microscope platform.

Key words: Energy dispersive X-ray spectrometry; microanalysis; microcalorimeter; scanning electron microscopy; transition edge sensor. 

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Copyright information

© Springer-Verlag Wien 2002

Authors and Affiliations

  • Dale Newbury
    • 1
  • David Wollman
    • 1
  • Sae Woo Nam
    • 1
  • Gene Hilton
    • 1
  • Kent Irwin
    • 1
  • John Small
    • 1
  • John Martinis
    • 1
  1. 1.National Institute of Standards and Technology, Gaithersburg, MD 20899-8371, USAUS

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