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Microchimica Acta

, Volume 156, Issue 1–2, pp 69–72 | Cite as

Quantitative nitrogen analysis by Auger electron spectrometry and glow discharge optical emission spectrometry

  • Stefan BaunackEmail author
  • Volker Hoffmann
  • Wieland Zahn
Original Paper

Abstract.

Nitrides of refractory metals are investigated as diffusion barriers for Cu metallization. The composition, thermal stability and inter diffusion in layered systems are characterized by depth profile analysis. For the quantification of depth profiles determination of sensitivity factors is essential. For nitrogen and other light elements matrix specific standards are often not available and compound standards are used for calibration. We have investigated the systems Ta–N and Ta–Si–N and for comparison Cr–N by means of Auger electron spectrometry (AES) and glow discharge optical emission spectrometry (GDOES). A non-linear calibration curve for the N/Cr intensity ratio was observed with GDOES in the Cr–N-system, probably caused by self-absorption of the Cr line.

Key words: AES; GDOES; nitride; diffusion barrier; depth profiling; quantification. 

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Copyright information

© Springer-Verlag 2006

Authors and Affiliations

  1. 1.IFW Dresden, Leibniz-Institut für Festkörper- und Werkstoffforschung DresdenDresdenGermany
  2. 2.Westsächsische Hochschule Zwickau, Fachbereich Physikalische Technik/InformatikZwickauGermany

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