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Received: 3 January 1997/Accepted: 9 January 1997
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Eccardt, PC., Knoth, M., Ebest, G. et al. Coupled finite element and network simulation for microsystem components. Microsystem Technologies 3, 164–167 (1997). https://doi.org/10.1007/s005420050074
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DOI: https://doi.org/10.1007/s005420050074