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Nanosecond laser direct micron-scale texturing with breath figure method

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In this paper, we propose a novel laser direct micron-scale texturing technology. We utilized arranged liquid droplets as lenses to generate micron-scale patterns on a silicon surface. The breath figure method was employed to generate the arranged liquid droplets by self-assembly. The humidity source was a mix of glycerin and water at a volume ratio of 1:1. The solvent and polymer used were toluene and poly(methyl methacrylate (PMMA), respectively. The arranged liquid droplets were formed by the breath figure method and were followed by laser texturing on the Si substrate. Each laser pulse produced an area with a diameter of around 10 μm depending on the defocusing distance. Inside each laser pulse, the diameters of patterned holes were between 1.5 and 2 μm while the depths were between 17 and 22 nm. In conclusions, we demonstrated the liquid lenses arranged by the breath figure method could be utilized to generate micron-scale patterns. Meanwhile, the formed patterns showned that the liquid lenses outside the pattern area were not affected by neighboring pulses.

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The authors would like to acknowledge the financial support provided by Ministry of Science and Technology, Taiwan, R.O.C (MOST 107-2221-E-224-017-MY3 and MOST 107-2622-E-027-010-CC3).

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Correspondence to Yuan-Jen Chang.

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Chang, Y., Chou, S., Ho, C. et al. Nanosecond laser direct micron-scale texturing with breath figure method. Microsyst Technol (2020). https://doi.org/10.1007/s00542-020-04775-z

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