A MEMS based Fabry–Pérot accelerometer with high resolution
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Optical MEMS has become exceedingly popular because of its high performance and resistance to electromagnetic interference. A MEMS based Fabry–Pérot accelerometer consisting of a G-shaped mass-spring structure sensing chip, laser diode, cube beam splitter and photo translating system integrated by 3D printed sensor package is investigated. The sensitivity and resolution calibrated by intensity demodulation method are respectively, 183.793 V/g and 300 ng. The results show that the adopted G-shaped cantilever-mass structure sensing chip combined with the Fabry–Pérot interfere technology can obtain good performance, and the 3D printed sensor package makes the interference optical path and accelerometer more robust and portable.
The author’ contributions are as follows: MZ, and KJ conducted the experiment. MZ wrote the manuscript; HB, HW assisted with the experiments, sampling and laboratory analyses. XW was the Principal Investigator and supervised this work.
Supported by the National Key R&D Program of China (2018YFB2002303), Key research and development program of Shaanxi Province (2018ZDCXL-GY-02-03), National Natural Science Foundation of China (51575439) and 111 project (B12016). We also appreciate the support from State Key Laboratory of applied optics and International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies.
Compliance with ethical standards
Conflict of interest
The authors declare no competing financial interests.
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