Simulations, fabrication, and characterization of d31 mode piezoelectric vibration energy harvester

  • Renu SinghEmail author
  • B. D. Pant
  • Ankush Jain
Technical Paper


This paper presents the development work on d31 mode piezoelectric vibration energy harvester. The device structure consists of a fixed-free type cantilever beam with a seismic mass attached at the free end of the beam. On top of the cantilever beam, a ZnO piezoelectric layer is sandwiched between two metal electrodes. The harvester is designed using an FEM tool CoventorWare. The simulations are carried out to estimate the resonance frequency, mises stress, optimal load resistance, and generated power. The optimized design is then implemented using a five mask SOI bulk micromachining process. The fabricated harvester is characterized for frequency response using Polytec MSA-500 Micro System Analyzer. The experimental resonance frequency is found to be 235.38 Hz. The harvester is also evaluated for generated open-circuit voltage when subjected to harmonic acceleration. The open-circuit peak-to-peak voltage for 0.1 g acceleration is found to be 306 mV.



This research work was supported by Council of Scientific and Industrial Research (CSIR) under Emeritus Scientist’s Scheme No. 21(1011)/16/EMR-II.


  1. Beeby SP, Tudor MJ, White NM (2006) Energy harvesting vibration sources for microsystems applications. Meas Sci Technol 17(12):R175–R195CrossRefGoogle Scholar
  2. Deng L, Fang Y, Wang D, Wen Z (2018) A MEMS based piezoelectric vibration energy harvester for fault monitoring system. Microsyst Technol 24(9):3637–3644CrossRefGoogle Scholar
  3. Fang H-B, Liu J-Q, Xu Z-Y, Dong L, Wang L, Chen D, Cai B-C, Liu Y (2006) Fabrication and performance of MEMS-based piezoelectric power generator for vibration energy harvesting. Microelectron J 37(11):1280–1284CrossRefGoogle Scholar
  4. Lee BS, Lin SC, Wu WJ, Wang XY, Chang PZ, Lee CK (2009) Piezoelectric MEMS generators fabricated with an aerosol deposition PZT thin film. J Micromech Micromach 19(6):065014CrossRefGoogle Scholar
  5. Liu H, Tay CJ, Quan C, Kobayashi T, Lee C (2011) Piezoelectric MEMS energy harvester for low-frequency vibrations with wideband operation range and steadily increased output power. J Microelectromech Syst 20(5):1131–1142CrossRefGoogle Scholar
  6. Morimoto K, Kanno I, Wasa K, Kotera H (2010) High-efficiency piezoelectric energy harvesters of c-axis-oriented epitaxial PZT films transferred onto stainless steel cantilevers. Sens Actuators A 163(1):428–432CrossRefGoogle Scholar
  7. Park JC, Park JY, Lee Y-P (2010) Modelling and characterization of piezoelectric d 33-mode MEMS energy harvester. J Microelectromech Syst 19(5):1215–1222CrossRefGoogle Scholar
  8. Roundy S, Wright PK (2004) A piezoelectric vibration based generator for wireless electronics. Smart Mater Struct 13(5):1131–1142CrossRefGoogle Scholar
  9. Roundy S, Leland ES, Baker J, Carleton E, Reilly E, Lai E, Otis B, Rabaey JM, Wright PK, Sundararajan V (2005) Improving power output for vibration-based energy scavengers. IEEE Pervasive Comput 4(1):28–36CrossRefGoogle Scholar
  10. Sodano HA, Inman DJ, Park G (2004) A review of power harvesting from vibration using piezoelectric materials. Shock Vib Dig 36(3):197–205CrossRefGoogle Scholar

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© Springer-Verlag GmbH Germany, part of Springer Nature 2019

Authors and Affiliations

  1. 1.CSIR-Central Electronics Engineering Research Institute (CEERI)PilaniIndia

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