Microsystem Technologies

, Volume 25, Issue 12, pp 4577–4586 | Cite as

Design, analysis, and fabrication of silicon-based MEMS gyroscope for high-g shock platform

  • Jinkui Wang
  • Wenzhong Lou
  • Dakui WangEmail author
  • Hengzhen Feng
Technical Paper


This paper proposes a silicon-based micro-electro-mechanical systems (MEMS) tuning fork gyroscope designed for high-g shock environments. The results obtained by a shock experiment demonstrate that MEMS gyroscopes can still work well after a load of 30,000 g is applied to the y-axis. This MEMS gyroscope is double symmetrical and connected by middle coupling beams. The results obtained by mathematical analysis and finite element analysis revealed that the designed solid stoppers are helpful in improving the gyroscope’s shock resistance. The high aspect-ratio structures were fabricated by an efficient fabrication process using a silicon-on-glass wafer. To investigate the mechanical characteristics of the fabricated gyroscopes, the silicone’s fracture strength and Young’s modulus were obtained by conducting tensile tests. The working frequencies of the gyroscope were designed as 4000 Hz, and the driving and sensing modes in the test were 4095 Hz and 4137 Hz, respectively.



The research is supported by the State Key National Project (6141B021310).


  1. Acar C, Shkel A (2008) MEMS vibratory gyroscopes: structural approaches to improve robustness. SpringerGoogle Scholar
  2. Cao HL, Li HS, Lu X et al (2013) Temperature model or a vacuum packaged MEMS gyroscope structure. Key Eng Mater 562–565:280–285CrossRefGoogle Scholar
  3. Cao Y, Xi Z, Yu P et al (2016) Optical measurement of the dynamic contact process of a MEMS inertial switch under high shock loads. IEEE Trans Ind Electron 64:701–709CrossRefGoogle Scholar
  4. Gao LZ, Zhang XM, Wang Y (2015) Performance testing of MEMS gyroscope for rotating ammunition. J Test Meas Technol 29:118–122Google Scholar
  5. Gao Y, Li H, Huang L, Sun H et al (2017) A lever coupling mechanism in dual-mass micro-gyroscopes for improving the shock resistance along the driving direction. Sensors 17:995. CrossRefGoogle Scholar
  6. Lee JM, Chang UJ, Chang JC et al (2016a) High-shock silicon accelerometer with an over-range stopper. J Mech Sci Technol 30:1817–1824CrossRefGoogle Scholar
  7. Lee JM, Chang UJ, Chang JC et al (2016b) High-shock silicon accelerometer with a plate spring. Int J Precis Eng Manuf 17:637–644CrossRefGoogle Scholar
  8. Li J, Broas M, Makkonen J et al (2014) Shock impact reliability and failure analysis of a three-axis MEMS gyroscope. J Microelectromech Syst 23:347–355CrossRefGoogle Scholar
  9. Lin R, Li W, Zhao J et al (2013a) Optimization research on anti-high shock ability of quartz MEMS gyroscope. Piezoelectr Acoustoopt 35:56–58Google Scholar
  10. Lin RL, Li WY et al (2013b) Optimization research on anti high shock ability of quartz MEMS gyroscope. Piezoelectr Acoustoopt 35:56–58Google Scholar
  11. Lu Y, Wu X et al (2010) Optimization and analysis of novel piezoelectric solid micro-gyroscope with high resistance to shock. Microsyst Technol 16:571–584CrossRefGoogle Scholar
  12. Ni YF, Li HS, Huang LB, Yang B (2011) Shock analysis on dual-mass silicon micro-gyroscope. Adv Mater Res 338:401–405CrossRefGoogle Scholar
  13. Ni Y, Li H, Huang L et al (2014) On bandwidth characteristics of tuning fork micro-gyroscope with mechanically coupled sense mode. Sensors 14:13024–13045CrossRefGoogle Scholar
  14. Niu CF, Liu SP, Wang ZY (2012) Estimate of flying projectile attitude based on MEMS gyroscope measurements. Appl Mech Mater 236–237:236–241CrossRefGoogle Scholar
  15. Qiu X, Yang Z, Sun Y et al (2017) Shock-Resistibility of MEMS-based inertial micro switch under reverse directional ultra-high g acceleration for IOT applications. Sci Rep 7:45512CrossRefGoogle Scholar
  16. Si C, Han G, Ning J et al (2014) Shock resistance design of a high-performance MEMS tuning-fork gyroscope. Micronanoelectron Technol 51:302–307Google Scholar
  17. Tao YK, Liu YF, Dong JX (2014) Flexible stop and double-cascaded stop to improve shock reliability of MEMS accelerometer. Microelectron Reliab 54:1328–1337CrossRefGoogle Scholar
  18. Wang K, Zhang X, Tian J (2016) A rolling angle measurement algorithm based on fusion of two-axis accelerometer and MEMS gyroscope. J Xian Technol Univ 36:726–730Google Scholar
  19. Yang B, Wang X, Hu D et al (2017) Research on the non-ideal dynamics of a dual-mass silicon micro-gyroscope. Microsyst Technol 23:151–162CrossRefGoogle Scholar
  20. Yoon SJ et al (2015a) Tactical grade MEMS vibrating ring gyroscope with high shock reliability. Microelectron Eng 142:22–29CrossRefGoogle Scholar
  21. Yoon SJ et al (2015b) Design and analysis of MEMS vibrating ring gyroscope considering high-g shock reliability. Korean Inst Electr Eng 64:1440–1447Google Scholar
  22. Zhang Z et al (2015) Design, simulation and fabrication of triaxial MEMS high shock accelerometer. J Nanosci Nanotechnol 15:2952–2957CrossRefGoogle Scholar
  23. Zhang Y, Zhou B, Song M et al (2017) A novel MEMSGyro north finder design based on the rotation modulation technique. Sensors 17:973CrossRefGoogle Scholar
  24. Zhou J et al (2014) Design and fabrication of a micromachined gyroscope with high shock resistance. Microsyst Technol 20:137–144CrossRefGoogle Scholar

Copyright information

© Springer-Verlag GmbH Germany, part of Springer Nature 2019

Authors and Affiliations

  1. 1.School of Mechatronical EngineeringBeijing Institute of TechnologyBeijingChina
  2. 2.Beijing Institute of Electronic System EngineeringBeijingChina

Personalised recommendations