Fabrication of coplanar microheater platform for LPG sensing applications

  • Shobi BaggaEmail author
  • Jamil Akhtar
  • Sanjeev Mishra
  • Preeti
Technical Paper


The design and fabrication of nichrome based coplanar microheater for LPG sensing applications is presented in this work. Nichrome based coplanar microheater is fabricated using photolithography process. The surface morphology of DC sputtered nichrome is characterized using scanning electron microscope. Electrothermal behaviour of the fabricated microheater is characterized by varying the applied current while the thermal distribution pattern over the active heating area is recorded using thermal imaging camera. The silicon thickness under microheater active area is varied by silicon etching with different time duration in TMAH solution. Silicon thickness effect on maximum temperature of microheater is also investigated experimentally. The tin oxide (SnO2) thin film as LPG sensor is deposited on fabricated coplanar heating platform and it is tested with different amount of LPG concentration.



  1. Babar AR, Shinde SS, Moholkar AV, Bhosale CH, Kim JH, Rajpure KY (2011) Sensing properties of sprayed antimony doped tin oxide thin films: solution molarity. J Alloys Compounds 509:3108–3115CrossRefGoogle Scholar
  2. Bagga S, Bhat N, Mohan S (2009) LPG sensing system using tin oxide thin film transducer and 0.7 m CMOS signal conditioning ASIC. IEEE Trans Instrum Measurements 58(10):3653–3658CrossRefGoogle Scholar
  3. Bagga S, Akhtar J, Mishra S (2018) Influence of porosity on the properties of nanostructured tin oxide thin film. Material Res Express IOP 5(11):116406CrossRefGoogle Scholar
  4. Bhattacharyya P (2014) Technological journey towards reliable microheater development for MEMS gas sensors: a review. IEEE Trans Device Mater Reliab 14(2):589–599CrossRefGoogle Scholar
  5. Chaisitsak S (2011) Nanocrystalline SnO2: F thin films for liquid petroleum gas. Sensors 11(7):7127–7140CrossRefGoogle Scholar
  6. Gupta S, Roy RK, Chowdhury MP, Pal AK (2004) Synthesis of SnO2/Pd composite films by PVD route for a liquid petroleum gas sensor. Vacuum 75:111–119CrossRefGoogle Scholar
  7. Hierlemann A (2005) Integrated chemical microsensor systems in CMOS technology, New York (NY). Springer-Verlag, USAGoogle Scholar
  8. Majumder S, Hussain S, Das SN, Bhar RB, Pal AK (2008) Silicon doped SnO2 films for liquid petroleum gas sensor. Vacuum 82:760–770CrossRefGoogle Scholar
  9. Mishra VN, Agarwal RP (1998) Sensitivity, response and recovery time of SnO2 based thick-film sensor array for H2, CO, CH4 and LPG. Microelectron J 29(11):861–874CrossRefGoogle Scholar
  10. Neri G (2015) First 50 years of chemoresistive gas sensors. Chemosensors 3:1–20MathSciNetCrossRefGoogle Scholar
  11. Phani AR, Manorama S, Rao VJ (1999) Preparation, characterization and electrical properties of SnO2 based liquid petroleum gas. Mater Chem Phys 58(2):101–108CrossRefGoogle Scholar
  12. Prajesh R, Jain N, Agarwal A (2015) Low power highly sensitive platform for gas sensing application. Microsyst Technol 22:2185–2192CrossRefGoogle Scholar
  13. Prasannakumari K et al (2018) Synthesis of nanostructured tin oxide thin films with faster response to LPG and ammonia by spray pyrolysis. Mater Res Express 5:014007CrossRefGoogle Scholar
  14. Reddy M, Chandorkar MH (1999) E-beam deposited SnO2, Pt-SnO2 and Pd-SnO2 thin films for LPG detection. Thin Solid Films 349:260–265CrossRefGoogle Scholar
  15. Roy S, Sarkar CK, Bhattacharyya P (2012a) Low temperature fabrication of a highly sensitive methane sensor with embedded co-planar nickel alloy microheater on MEMS platform. Sens Lett 10(3/4):759–768Google Scholar
  16. Roy S, Sarkar CK, Bhattacharyya P (2012b) A highly sensitive methane sensor with nickel alloy microheater on micromachined Si substrate. Solid State Electron 76:84–90CrossRefGoogle Scholar
  17. Sberveglieri G, Hellmich W, Muller G (1997) Silicon hotplates for metal oxide gas sensor elements. Microsyst Technol 3(4):183–190CrossRefGoogle Scholar
  18. Senguttuvan TD, Rai R, Lakshmikumar ST (2007) Gas sensing properties of lead doped tin oxide thick films. Mater Lett 61:582–584CrossRefGoogle Scholar
  19. Simon I, Barsan IN, Bauer M, Weimar U (2001) Micromachined metal oxide gas sensors: opportunities to improve sensor performance. Sens Actuators B Chem 73(1):1–26CrossRefGoogle Scholar
  20. Thomas B, Benoy S, Radha KK (2008) Influence of Cs doping in spray deposited SnO2 thin films for LPG sensors. Sens Actuat B 133:404–413CrossRefGoogle Scholar
  21. Vaishampayan MV, Deshmukh RG, Mulla IS (2008) Influence of Pd doping on morphology and LPG response of SnO2. Sens Actuat B 131:665–672CrossRefGoogle Scholar

Copyright information

© Springer-Verlag GmbH Germany, part of Springer Nature 2019

Authors and Affiliations

  1. 1.Rajasthan Technical UniversityKotaIndia
  2. 2.School of Electrical, Electronics & Communication EngineeringManipal University Jaipur (MUJ)JaipurIndia

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