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Fabrication of SU-8 photoresist micro–nanofluidic chips by thermal imprinting and thermal bonding

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Micro–nanofluidic chips have been widely applied in biological and medical fields. In this paper, a simple and low-cost fabrication method for micro–nano fluidic chips is proposed. The nano-channels are fabricated by thermal nano-imprinting on an SU-8 photoresist layer followed by thermal bonding with a second SU-8 photoresist layer. The micro-channels are produced on the second layer by UV exposure and then thermal bonded by a third layer of SU-8 photoresist. The final micro–nano fluidic chip consists of micro-channels (width of 200.0 ± 0.1 μm and, depth of 8.0 ± 0.1 μm) connected by nano-channels (width of 533 ± 6 nm and, depth of 372 ± 6 nm), which has great potential in molecular filtering and detection.

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This work is supported by National Natural Science Foundation of China (No. 51775088).

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Correspondence to Helin Zou.

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Sun, L., Liu, L., Qi, L. et al. Fabrication of SU-8 photoresist micro–nanofluidic chips by thermal imprinting and thermal bonding. Microsyst Technol 26, 861–866 (2020).

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