Cubic centimeter robot based on inertial stick–slip driving
- 47 Downloads
In order to achieve the nano-operation in a limited space, a precision motion platform with a cubic centimeter volume based on the principle of inertial stick–slip driving is proposed in this paper. The mechanical structure and the operating principle are discussed. Kinematic models are used to analyze the performance of the prototype. To investigate the working performance of the prototype, a series of experiments are carried out. Experimental results show that the displacement outputs is related to the parameters of the electrical signal. The maximum moving speed of the platform reaches 13.1 mm/s when the driving frequency is 3.1 kHz. The maximum single step displacement reaches 4.8 μm. Through proper driving voltage and frequency, the proposed prototype can produce a satisfactory velocity.
The work was supported by the National Natural Science Foundation of China (No. 51875378), the Jiangsu province Natural Science Foundation (No. BK20181439) and the Suzhou science and technology development project (No. SYG201720).
Supplementary material 1 (MP4 2890 kb)
- Hui X, Onal C, Régnier S et al (2011) Automated control of AFM based nanomanipulation. Atomic force microscopy based nanorobotics. Springer, BerlinGoogle Scholar
- Hunstig M (2017) Piezoelectric inertia motors—a critical review of history. Concept Des Appl Perspect 2017(6):7Google Scholar
- Liang C, Wang F, Tian Y et al (2017) Design of a novel asymmetrical piezoelectric actuated microgripper for micromanipulation. In: IEEE international conference on manipulation, manufacturing and measurement on the nanoscale. IEEE, pp 318–322Google Scholar
- Yoshihiro N, Hisayuki A (2007) Development of inertia driven micro robot with nano tilting stage for SEM operation. Microsyst Technol 13(8–10):1347–1352Google Scholar