Advertisement

Trapezoidal-shaped electrostatic comb-drive actuator with large displacement and high driving force density

  • Phuc Hong PhamEmail author
  • Kien Trung HoangEmail author
  • Dich Quang Nguyen
Technical Paper
  • 16 Downloads

Abstract

This paper presents a design of a comb finger shape and calculation of a trapezoidal-shaped electrostatic comb-drive actuator (TECA) in order to aim a higher electrostatic force density and larger displacement in comparison with the typical rectangular-shaped electrostatic comb-drive actuator (RECA). Relation between a beam’s stiffness and a driving voltage has been examined to predict a pull-in effect occurring in TECA. Micro fabrication and characterization of TECA and RECA systems are performed by using a standard SOI-MEMS technology. Theoretical and experimental results confirm the strong points of TECA’s structure (similar to the dimensions of RECA) such as a larger number of movable comb finger arrayed at the same length and larger displacement. At driving voltages of 47.9 and 50 (V), the calculation and measurement displacement of TECA are approximately 2.2 and 1.78 times larger than that of RECA, respectively.

Notes

Acknowledgements

This research is funded by Vietnam National Foundation for Science and Technology Development (NAFOSTED) under Grant number “107.01-2011.06”.

References

  1. Bernstein J, Cho S, King AT, Kourepenis A, Maciel P, Weinberg M (1993) A micromachined comb-drive tuning fork rate gyroscope. In: Proc. IEEE micro electro mechanical systems workshop (MEMS’93), pp 143–148Google Scholar
  2. Borovic B, Lewis FL, Liu AQ, Kolesar ES, Popa D (2006) The lateral instability problem in electrostatic comb drive actuators: modeling and feedback control. J Micromech Microeng 16(7):1233–1241CrossRefGoogle Scholar
  3. Dao DV, Pham PH, Sugiyama S (2011) Multimodule micro transportation system based on electrostatic comb-drive actuator and ratchet mechanisms. J Microelectromech Syst 20(1):140–149CrossRefGoogle Scholar
  4. Engelen JBC, Lantz MA, Rothuizen HE, Abelmann L, Elwenspoek MC (2009) Improved performance of large stroke comb-drive actuators by using a stepped finger shape. In: Proc. of the int. conf. on solid-state sensors, actuators and microsystems (TRANSDUCERS), Denver, 21–25 June 2009, pp 1762–1765Google Scholar
  5. Gao Y, You Zh, Zhao J (2015) Electrostatic comb-drive actuator for MEMS relays/switches with double-tilt comb fingers and tilted parallelogram beams. J Micromech Microeng 25(4):045003CrossRefGoogle Scholar
  6. Harouche IPF, Shafai C (2004) Simulation of shaped comb drive as a stepped actuator for micro tweezers application. Sens Actuators A 123–124:540–546Google Scholar
  7. Imboden M, Morrison J, Lowell E, Han H, Bishop DJ (2014) Controlling levitation and enhancing displacement in electrostatic comb drives of MEMS actuators. J Microelectromech Syst 23(5):1063–1072CrossRefGoogle Scholar
  8. Jensen BD, Mutlu S, Miller S, Kurabayashi K, Allen JJ (2003) Shaped comb fingers for tailored electromechanical restoring force. J Microelectromech Syst 12(3):373–383CrossRefGoogle Scholar
  9. Kang S, Kim HC, Chun K (2009) A low-loss, single-pole, four-throw RF MEMS switch driven by a double stop comb drive. J Micromech Microeng 19:035011CrossRefGoogle Scholar
  10. Khan F, Bazaz SA, Sohail M (2010) Design, implementation and testing of electrostatic SOI MUMPs based microgripper. Microsyst Technol 16(11):1957–1965CrossRefGoogle Scholar
  11. Kotani T, Yamada T, Yamasaki S et al (2014) Driving force profile design in comb drive electrostatic actuators using a level set-based shape optimization method. Struct Multidisc Optim 51(2):369–383CrossRefGoogle Scholar
  12. Legtenberg R, Groeneveld AW, Elwenspoek M (1996) Comb-drive actuators for large displacements. J Micromech Microeng 6:320–329CrossRefGoogle Scholar
  13. Ou K, Chen K, Yang T, Lee S (2011) A novel semi analytical approach for finding pull-in voltages of micro cantilever beams subjected to electrostatic loads and residual stress gradients. J Microelectromech Syst 20(2):527–537CrossRefGoogle Scholar
  14. Pham PH, Dang LB, Nguyen VH, Dau VT (2017) Development of new electrostatic micro cam system driven by elastic wings. Microsyst Technol 23(12):5669–5675CrossRefGoogle Scholar
  15. Rosa MA, Harrison HB (1998) Improved operation of micromechanical comb-drive actuators through the use of a new angled comb finger design. J Intell Mater Syst Struct 9(4):283–290CrossRefGoogle Scholar
  16. Tang WC, Nguyen TH, Michael WJ, Howe RT (1990) Electrostatic comb drive of lateral polysilicon resonators. Sens Actuators A21–23:328–331CrossRefGoogle Scholar
  17. Ye W, Mukherjee S, MacDonald NC (1998) Optimal shape design of an electrostatic comb drive in microelectromechanical systems. J Microelectromech Syst 7(1):16–26CrossRefGoogle Scholar

Copyright information

© Springer-Verlag GmbH Germany, part of Springer Nature 2019

Authors and Affiliations

  1. 1.School of Mechanical EngineeringHanoi University of Science and Technology (HUST)HanoiVietnam
  2. 2.Institute for Control Engineering and AutomationHanoi University of Science and Technology (HUST)HanoiVietnam

Personalised recommendations