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Out-of-plane deformation and pull-in voltage of cantilevers with residual stress gradient: experiment and modelling

  • Anna Persano
  • Jacopo Iannacci
  • Pietro Siciliano
  • Fabio Quaranta
Technical Paper
  • 59 Downloads

Abstract

The out-of-plane deformation and the pull-in voltage of electrostatically actuated cantilevers with a residual stress gradient, is investigated in the length range 100–300 µm. Measured pull-in voltages are compared with calculations, which are obtained using previously proposed analytical expressions and a finite element method (FEM) modelling. In particular, a simplified model of the residual stress distribution inside cantilevers is formulated that enables FEM simulation of measured out-of-plane deformations and pull-in voltages for all lengths of fabricated cantilevers. The presented experimental results and FEM model are exploitable in the design of cantilever-based microelectromechanical systems, in order to provide a reliable prediction of the influence of residual stress gradient on device shape and pull-in voltage.

Notes

Acknowledgements

The authors thank M.C. Martucci for performing surface profilometry measurements.

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Copyright information

© Springer-Verlag GmbH Germany, part of Springer Nature 2018

Authors and Affiliations

  • Anna Persano
    • 1
  • Jacopo Iannacci
    • 2
  • Pietro Siciliano
    • 1
  • Fabio Quaranta
    • 1
  1. 1.IMM-CNR, Institute for Microelectronics and Microsystem-Unit of Lecce, National Council of ResearchLecceItaly
  2. 2.CMM–FBK, Center for Materials and Microsystems, Fondazione Bruno KesslerTrentoItaly

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