Analysis on edge effect of MEMS capacitance diaphragm gauge with square pressure-sensing diaphragm
- 10 Downloads
For high-accuracy MEMS capacitance sensors, the edge effect of capacitance cannot be ignored. This paper introduces a MEMS capacitance diaphragm gauge with a square pressure-sensing diaphragm for 1–1000 Pa measurement. The edge effect is analyzed using integrated method and conformal transformation theory. FEM software is used to calculate the capacitance and sensitivity of the MEMS capacitance diaphragm gauge. The results show that the edge effect is weakened with the increase of 2a/d (the ratio of the length 2a of the diaphragm and the depth d of vacuum gap). And the thickness t of the diaphragm also has a positive contribution to the edge effect. With optimization of the diaphragm and vacuum gap design, the capacitance error caused by the edge effect is 2.2%, meanwhile, high sensitivity and good linearity can be kept.
This work is supported by Natural Science Foundation of China (no. 61627805).
- Eswaran P, Malarvizhi S (2013) MEMS capacitance pressure sensors: a review on recent development and prospective. Int J Eng Technol 3(5):2734–2746Google Scholar
- Gao S, Liu H (2008) Micro electro mechanical system mechanics. National Defense Industry Press, Beijing, pp 108–110Google Scholar
- Hemni H, Shooji S,Yosimi K, Esashi M (1993) Transducers’93. In: Seventh international conference on solid-state sensors and actuars, Denki-Gakkai. p 584Google Scholar
- Maryam NJ, Bahram AG (2016) Design and analysis of a novel MEMS capacitive tire pressure sensor with high sensitivity and linearity. Majlesi J Telecommun Device 5(2):69–75Google Scholar
- Shahiri-Tabarestani M, Ganji BA, Sabbaghi-Nadoosham R (2012) Design and simulation of high sensitive capacitive pressure sensor with slotted diaphragm. In: International conference on biomedical engineering. https://doi.org/10.1109/icobe.2012.619064
- Sharma A (2008) Modeling of pull-in Voltage and touch-point pressure for MEMS capacitive transducer with square diaphragm. Kurukshetra University, Kurukshetra Ph.D. thesis. pp 376–382Google Scholar
- Tenchine L, Baillin X, Faure C, Nicolas P (2010) NEG thin diaphragms for under controlled atmosphere MEMS packaging. Sens Actuators A 5(1):359–362Google Scholar
- Zhang Y, Howver R, Gogoi B, Yazdi N (2011) A high-sensitive ultra-thin MEMS capacitive pressure sensor. In: 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference. https://doi.org/10.1109/TRANSDUCERS.2011.5969151
- Zhixun H, Xiaojin W (1996) Theory and technology of microwave transmission. Science Press, Beijing, pp 102–106Google Scholar