Design and analysis of perforated MEMS resonator

  • Koushik Guha
  • Hrishikesh Dutta
  • Jasti Sateesh
  • S. Baishya
  • K. Srinivasa RaoEmail author
Technical Paper


In this paper, we have designed an optimal design of microelectromechanical (MEMS) resonator. The paper explains the idea of suitable design, modeling and optimization of the MEMS RF resonator. The resonator has been designed to achieve a high quality factor and optimum pull in voltage and keeping the dimension as small as possible. The design approach uses the Dragonfly algorithm for minimizing the pull in voltage. The resonator is basically a perforated structure incorporating circular holes.



The authors would like to thank to NMDC by National Institute of Technology, Silchar for providing the necessary computational tools.


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Copyright information

© Springer-Verlag GmbH Germany, part of Springer Nature 2018

Authors and Affiliations

  • Koushik Guha
    • 1
  • Hrishikesh Dutta
    • 1
  • Jasti Sateesh
    • 1
  • S. Baishya
    • 1
  • K. Srinivasa Rao
    • 2
    Email author
  1. 1.National MEMS Design Centre, Department of Electronics and Communication EngineeringNational Institute of Technology, SilcharSilcharIndia
  2. 2.MEMS Research Center, Department of Electronics and Communication EngineeringKoneru Lakshmaih Education Foundation (Deemed to be University)GunturIndia

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