Advertisement

Design and analysis of perforated MEMS resonator

  • Koushik Guha
  • Hrishikesh Dutta
  • Jasti Sateesh
  • S. Baishya
  • K. Srinivasa RaoEmail author
Technical Paper
  • 64 Downloads

Abstract

In this paper, we have designed an optimal design of microelectromechanical (MEMS) resonator. The paper explains the idea of suitable design, modeling and optimization of the MEMS RF resonator. The resonator has been designed to achieve a high quality factor and optimum pull in voltage and keeping the dimension as small as possible. The design approach uses the Dragonfly algorithm for minimizing the pull in voltage. The resonator is basically a perforated structure incorporating circular holes.

Notes

Acknowledgements

The authors would like to thank to NMDC by National Institute of Technology, Silchar for providing the necessary computational tools.

References

  1. Bannon FD, Clark JR, Nguyen C-C (2000) High-Q RF microelectromechanical filters. IEEE J Solid State Circuits 35(4):512–526CrossRefGoogle Scholar
  2. Brank J, Yao J, Eberly M, Malczewski A, Varian K, Goldsmith C (2001) RF MEMS-based tunable filters. Int J RF Microw Comput Aided Eng 11(5):276–284CrossRefGoogle Scholar
  3. Campbell C (1998) Surface acoustic wave devices for mobile and wireless communications. Academic Press, CambridgeGoogle Scholar
  4. Devi NM, Maity S, Saha R, Metya SK (2015) RF MEMS and CSRR- based tunable filter designed for KU and K bands application. Cogent Eng 2(1).  https://doi.org/10.1080/23311916.2015.1083641
  5. Duwel A, Candler RN, Kenny TW, Varghese M (2006) Engineering MEMS resonators with low thermo elastic damping. J Microelectromech Syst 15(6):1437–1445CrossRefGoogle Scholar
  6. El-Tanani MA, Rebeiz GM (2010) High-performance 1.5–2.5-GHz RF-MEMS tunable filters for wireless applications. IEEE Trans Microw Theory Tech 58(6):1629–1637.  https://doi.org/10.1109/TMTT.2010.2049166 CrossRefGoogle Scholar
  7. Fang X, Myung N, Nobe K, Judy JW (2001) Modeling the effect of etch holes on ferromagnetic MEMS. IEEE Trans Magn 37(4):2637–2639CrossRefGoogle Scholar
  8. Fang D-M, Li X-H, Yuan Q, Zhang H-X (2010) Effect of etch holes on the capacitance and pull-in voltage in MEMS tunable capacitors. Int J Electron 97(12):1439–1448CrossRefGoogle Scholar
  9. Guha K, Kumar M, Agarwal S, Baishya S (2015) A modified capacitance model of RF MEMS shunt switch incorporating fringing field effects of perforated beam. Solid State Electron 114:35–42CrossRefGoogle Scholar
  10. Guha K, Laskar N, Gogoi H, Borah A, Baishnab K, Baishya S (2017) Novel analytical model for optimizing the pull-in voltage in a flexure MEMS switch incorporating beam perforation effect. Solid State Electron 137:85–94CrossRefGoogle Scholar
  11. Gupta S (2004) Estimation of thermo-elastic dissipation in MEMS. Ph.D. dissertation, Dept. Mechanical Engineering, Indian Institute of Science, BangaloreGoogle Scholar
  12. Khorramabadi H, Gray PR (1984) High-frequency CMOS continuous time filters. IEEE J Solid State Circuits 19(6):939–948CrossRefGoogle Scholar
  13. Li S-S (2013) CMOS-MEMS resonators and their applications. In: European frequency and time forum & international frequency control symposium (EFTF/IFC), 2013 joint, IEEE, pp 915–921Google Scholar
  14. Odonnell W, Langer B (1962) Design of perforated plates. J Eng Ind 84(3):307–319CrossRefGoogle Scholar
  15. Pacheco SP, Katehi LP, Nguyen C-C (2000) Design of low actuation voltage RF MEMS switch. In: Microwave symposium digest. 2000 IEEE MTT-S international, IEEE, vol 1, pp 165–168Google Scholar
  16. Piazza G, Stephanou PJ, Pisano AP (2007) One and two port piezoelectric higher order contour-mode MEMS resonators for mechanical signal processing. Solid State Electron 51(11–12):1596–1608CrossRefGoogle Scholar
  17. Pruthi M, Singh A (2014) Analysis and study of quality factor for simple fixed beam MEMS resonator. Int J Eng Res Gen Sci 2(4):293–298Google Scholar
  18. Rennick R (1973) An equivalent circuit approach to the design and analysis of monolithic crystal filters. IEEE Trans Sonics Ultrasonics 20(4):347–353CrossRefGoogle Scholar
  19. Sekar V, Armendariz M, Entesari K (2011) A 1.2–1.6-GHz substrate-integrated-waveguide RF MEMS tunable filter. IEEE Trans Microw Theory Tech 59(4):866–876.  https://doi.org/10.1109/TMTT.2011.2109006 CrossRefGoogle Scholar
  20. Shah K, Singh J, Zayegh A (2006) Modelling and analysis of fringing and metal thickness effects in MEMS parallel plate capacitors. In: Microelectronics: design, technology, and packaging II, international society for optics and photonics, vol 6035, p 603511Google Scholar
  21. Sharma AK, Gupta N (2014) Investigation of actuation voltage for non-uniform serpentine flexure design of RF-MEMS switch. Microsyst Technol 20(3):413–418CrossRefGoogle Scholar
  22. Shekhar S, Vinoy KJ, Ananthasuresh GK (2011) Switching and release time analysis of electrostatically actuated capacitive RF MEMS switches. Sens Transducers J 130(7):77–90Google Scholar
  23. Simons RN, Hall DG, Miranda FA (2004) RF telemetry system for an implantable bio-MEMS sensor. In: Microwave symposium digest, 2004 IEEE MTT-S international, IEEE, vol 3, pp 1433–1436Google Scholar
  24. Spencer W (2012) Monolithic crystal filters. Phys Acoust 9:167–220CrossRefGoogle Scholar
  25. Stanimirović Z, Stanimirović I (2009) Mechanical properties of MEMS materials. In: Takahata K (ed) Micro electronic and mechanical systems. InTech. ISBN: 978-953-307-027-8Google Scholar
  26. Zuo C, Sinha N, Piazza G (2010) Very high frequency channel select MEMS filters based on self-coupled piezoelectric AIN contour-mode resonators. Sens Actuators A 160(1–2):132–140CrossRefGoogle Scholar

Copyright information

© Springer-Verlag GmbH Germany, part of Springer Nature 2018

Authors and Affiliations

  • Koushik Guha
    • 1
  • Hrishikesh Dutta
    • 1
  • Jasti Sateesh
    • 1
  • S. Baishya
    • 1
  • K. Srinivasa Rao
    • 2
    Email author
  1. 1.National MEMS Design Centre, Department of Electronics and Communication EngineeringNational Institute of Technology, SilcharSilcharIndia
  2. 2.MEMS Research Center, Department of Electronics and Communication EngineeringKoneru Lakshmaih Education Foundation (Deemed to be University)GunturIndia

Personalised recommendations