Microfluidic inertial switch based on J-shape communicating vessels

  • Jiajie LiEmail author
  • Weirong Nie
  • Guowei Liu
Technical Paper


This paper presents a novel microfluidic inertial switch which uses J-shape communicating vessels structure and adopts non-toxic brine (NaCl solution) as the working fluid. Firstly, the operational principle of the switch was introduced. Then, the acceleration threshold of the switch was theoretical analyzed. Fluent with VOF and CSF module has been adopted to study the relationship between the acceleration threshold and the structure parameters. Finally, in order to verify the operational principle of the switch, a prototype was fabricated using soft lithography. The acceleration threshold of the switch increases with the decrease of the initial height difference of the two capillary valves, and the decrease of the neck width and outlet length of Valve 2. The measured threshold of the prototype is 92.9g. The error rate between the experimental and theoretical results is less than 5.0%.



This research is supported by National Natural Science Foundation of China, No. 51475245.


  1. Chang KJ, Po-Hung K, Yu-Tse L et al (2013) A passive inertial switch using MWCNT–hydrogel composite with wireless interrogation capability. J Microelectromech Syst 22:646–654CrossRefGoogle Scholar
  2. Chen JM, Huang P-C, Lin M-G et al (2008) Analysis and experiment of capillary valves for microfluidics on a rotating disk. Microfluid Nanofluid 4:427–437CrossRefGoogle Scholar
  3. Cho H, Kim H-Y, Kang JY et al (2007) How the capillary burst microvalve works. J Colloid Interface Sci 306:379–385CrossRefGoogle Scholar
  4. Feng Y, Zhou Z, Ye X et al (2003) Capillary valves based on hydrophobic microfluidics. Sens Actuators A 108:138–143CrossRefGoogle Scholar
  5. Huang Y-C, Sung W-L, Lai W-C et al (2013) Design and Implementation of time-delay switch triggered by inertia load. In: 2013 IEEE 26th international conference on micro electro mechanical systems (MEMS). IEEE, Taiwan, pp 729–732CrossRefGoogle Scholar
  6. Huawei C, Tao Y, Yi L et al (2010) Modeling and simulation of micro-fluid inertial switches based on the capillary valve. Micronanoelectronic Technol 47(12):742–775Google Scholar
  7. Kim J, Kim C-J (2002) Nanostructured surfaces for dramatic reduction of flow resistance in droplet-based microfluidics. IEEE 2002:479–482Google Scholar
  8. Kim J, Kido H, Rangel RH et al (2008) Passive flow switching valves on a centrifugal microfluidic platform. Sens Actuators B 128:613–621CrossRefGoogle Scholar
  9. Park U, Yoo K, Kim J (2010) Development of a MEMS digital accelerometer (MDA) using a microscale liquid metal droplet in a microstructured photosensitive glass channel. Sens Actuators A 159(1):51–57CrossRefGoogle Scholar
  10. Shen T, Zhang D, Huang L et al (2016) An automatic-recovery inertial switch based on a gallium–indium metal droplet. J Micromech Microeng 26(11):115016CrossRefGoogle Scholar
  11. Tingting L, Wei S, Tao Y et al (2014a) Vibration interference analysis and verification of micro-fluidic inertial switch. AIP Adv 4:031313CrossRefGoogle Scholar
  12. Tingting L, Wei S, Yang T et al (2014b) Evaluation of the threshold trimming method for micro inertial fluidic switch based on electrowetting technology. AIP Adv 4:037126CrossRefGoogle Scholar
  13. Xin D, Ping Z, Yong-shun L et al (2011) Burst pressure of capillary burst valve based on glass and PDMS. Opt Precis Eng 19(8):1852–1858CrossRefGoogle Scholar
  14. Yoo K, Kim J (2009) A novel configurable MEMS inertial switch using microscale liquid-metal droplet. In: 2009 IEEE 22nd international conference on micro electro mechanical systems. IEEE, Italy, pp 793–796CrossRefGoogle Scholar
  15. Yoo K, Park U, Kim J (2011) Development and characterization of a novel configurable MEMS inertial switch using a microscale liquid-metal droplet in a microstructured channel. Sens Actuators A 166:234–240CrossRefGoogle Scholar
  16. Yuan X, Tao Y, Yi L et al (2013) Fabrication and test of mercury micro-fluidic inertial switch. Transducer Microsyst Technol 32(5):114–117Google Scholar

Copyright information

© Springer-Verlag GmbH Germany, part of Springer Nature 2018

Authors and Affiliations

  1. 1.School of Mechanical EngineeringNanjing University of Science and TechnologyNanjingChina

Personalised recommendations