Microsystem Technologies

, Volume 25, Issue 2, pp 477–486 | Cite as

Analysis of microstructure replication using vibratory assisted thermal imprint process

  • Amer Sodah
  • Rimvydas Gaidys
  • Birutė Narijauskaitė
  • Rokas Šakalys
  • Giedrius Janušas
  • Arvydas Palevičius
  • Paulius PalevičiusEmail author
Technical Paper


In this article, thermal imprint process for replication of high-quality microstructures on the surface of polymer is investigated. Vibrations has been previously employed as an additional measure to enhance the replicability of microstructure into the pre-heated polymer. On the other hand, polymer behavior under the action of vibrations is not sufficiently studied. In this article, thermal microstructure replication is modeled and simulated by applying vibratory assisted thermal imprint to provide a better comprehension of the replication process peculiarities that would lead to improvement of the replication process itself. Different aspects of the process are analyzed: depth of imprinted pattern, pressure, traction force, residual field of plastic deformations and stresses. Numerical simulation results are verified experimentally. The results of the research shows that process assistance with vibratory excitation results in higher imprint depth compared with the specimens, imprinted under the identical process conditions without vibratory excitation.



This research was funded by the Grant no. S-MIP-17-102 from the Research Council of Lithuania.


  1. Eusner T, Hale M, Hardt DE (2010) Process robustness of hot embossing microfluidic devices. J Manuf Sci Eng 132(3):030920–030928. CrossRefGoogle Scholar
  2. Fairbanks H (1974) Applying ultrasonics to the moulding of plastic powders. Ultrasonics 12(1):22–24.
  3. Giboz J, Copponnex T, Mélé P (2007) Microinjection molding of thermoplastic polymers: a review. J Micromech Microeng 17(6):R96.
  4. Heckele M, Bacher W, Müller KD (1998) Hot embossing—the molding technique for plastic microstructures. Microsystem Technologies 4(3):122–124. 10.1007/s005420050112, URL
  5. Hung C, Chen RH, Lin CR (2002) The characterisation and finite-element analysis of a polymer under hot pressing. Int J Adv Manuf Technol 20(3):230–235. CrossRefGoogle Scholar
  6. Juang YJ, Lee LJ, Koelling KW (2002) Hot embossing in microfabrication. Part II: rheological characterization and process analysis. Polym Eng Sci 42(3):551–566. CrossRefGoogle Scholar
  7. Jung W, Lee HJ, Park K (2015) Investigation of localized heating characteristics in selective ultrasonic imprinting. Int J Precis Eng Manuf 16(9):1999–2004. CrossRefGoogle Scholar
  8. Jung W, Park K (2014) Selective ultrasonic imprinting for micropattern replication on predefined area. Ultrasonics 54(6):1495–1503. URL
  9. Khuntontong P, Blaser T, Schomburg WK (2008) Ultrasonic micro hot embossing of polymers exemplified by a micro thermal flow sensor. In: 2nd European conference & exhibition on integration issues of miniaturized systems—MOMS. MOEMS, ICS and Electronic Components. Barcelona, Spain, pp 1–8.
  10. Kolew A, Münch D, Sikora K, Worgull M (2011) Hot embossing of micro and sub-micro structured inserts for polymer replication. Microsyst Technol 17(4):609–618. CrossRefGoogle Scholar
  11. Koҫ M, Mahabunphachai S (2011) Micro-forming. Wiley, New York, pp 275–299. Google Scholar
  12. Lan S, Lee H, Lee S, Ni J, Lai X, Lee H, Song J, Lee M (2009) Experimental and numerical study on the viscoelastic property of polycarbonate near glass transition temperature for micro thermal imprint process. Mater Des 30(9):3879–3884. CrossRefGoogle Scholar
  13. Lin CH, Chen R (2007) Effects of mold geometries and imprinted polymer resist thickness on ultrasonic nanoimprint lithography. J Micromech Microeng 17(7):1220.
  14. Liu SJ, Dung YT (2005) Hot embossing precise structure onto plastic plates by ultrasonic vibration. Polym Eng Sci 45(7):915–925. CrossRefGoogle Scholar
  15. Mekaru H, Nakamura O, Maruyama O, Maeda R, Hattori T (2007) Development of precision transfer technology of atmospheric hot embossing by ultrasonic vibration. Microsyst Technol 13(3):385–391. Google Scholar
  16. Narijauskaitė B, Palevičius A, Gaidys R, Janušas G, Šakalys R (2013a) Polycarbonate as an elasto-plastic material model for simulation of the microstructure hot imprint process. Sensors 13(9):11229–11242.
  17. Narijauskaitė B, Palevičius A, Janušas G, Šakalys R (2013b) Numerical investigation of dynamical properties of vibroactive pad during hot imprint process. J Vibroeng 15(4):1983–1990Google Scholar
  18. Özel T, Thepsonthi T (2011) Mechanical micro-machining. Wiley, New York, pp 235–274. Google Scholar
  19. Park JH, Lee KY, Park K (2015) Coupled numerical analysis to investigate the heating mechanism of ultrasonic imprint lithography. Ultrasonics 60:96–102. URL
  20. Peng L, Deng Y, Yi P, Lai X (2014) Micro hot embossing of thermoplastic polymers: a review. J Micromech Microeng 24(1):013001.
  21. Pouzada AS, Ferreira EC, Pontes AJ (2006) Friction properties of moulding thermoplastics. Polym Test 25(8):10171023.
  22. Šakalys R, Janušas G, Palevičius A, Čekas E, Jūrėnas V, Sodah A (2016) Microstructures replication using high frequency excitation. Microsyst Technol 22(7):1831–1843. CrossRefGoogle Scholar
  23. Schomburg WK, Burlage K, Gerhardy C (2011) Ultrasonic hot embossing. Micromachines 2(2):157–166.
  24. Seo YS, Park K (2012) Direct patterning of micro-features on a polymer substrate using ultrasonic vibration. Microsyst Technol 18(12):2053–2061. CrossRefGoogle Scholar
  25. Worgull M, Hétu JF, Kabanemi KK, Heckele M (2008) Hot embossing of microstructures: characterization of friction during demolding. Microsyst Technol 14(6):767–773. CrossRefGoogle Scholar
  26. Yao D (2011) Polymer micro-molding/forming processes. Wiley, New York, pp 197–233. Google Scholar

Copyright information

© Springer-Verlag GmbH Germany, part of Springer Nature 2018

Authors and Affiliations

  1. 1.Faculty of Mechanical Engineering and DesignKaunas University of TechnologyKaunasLithuania
  2. 2.Faculty of Mathematics and Natural SciencesKaunas University of TechnologyKaunasLithuania

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