Microsystem Technologies

, Volume 25, Issue 1, pp 115–119 | Cite as

Support vector regression and neural networks analytical models for gas sensor based on molybdenum disulfide

  • Azar Alizadeh
  • Fatemeh Mosalanezhad
  • Abdolkarim Afroozeh
  • Elnaz AkbariEmail author
  • Zolkafle Buntat
Technical Paper


In this study, MoS2 gas sensor based on field effect transistor has been proposed and the adsorption of NO2 molecules on the channel surface can lead to significant changes on its electronic and transport properties. The analytical models have been developed for the NO2 gas sensors by making an initial assumption that the gate voltage is directly proportional to the gas concentration. The performance of this sensor, is predicted and investigated by support vector regression (SVR) and artificial neural network (ANN) algorithms. The MoS2 gas sensor displays current changes upon exposure to very low concentrations of NO2. The comparison between analytical model, ANN and SVR with the empirical data shows the successful model construction. However, ANN outperforms the SVR approach and gives more accurate results.



  1. Ahmad A et al (2014) A review on applications of ANN and SVM for building electrical energy consumption forecasting. Renew Sustain Energy Rev 33:102–109CrossRefGoogle Scholar
  2. Akbari E et al (2014) Analytical calculation of sensing parameters on carbon nanotube based gas sensors. Sensors 14(3):5502–5515CrossRefGoogle Scholar
  3. Akbari E et al (2018) Analytical investigation for MoS2 field effect transistor-based gas sensor. J Nanoelectron Optoelectron 13(3):399–404CrossRefGoogle Scholar
  4. Ansari R et al (2015) An ab initio investigation into the elastic, structural and electronic properties of MoS2 nanotubes. Superlattices Microstruct 82:188–200CrossRefGoogle Scholar
  5. Awad M, Khanna R (2015) Support vector regression. Efficient learning machines. Springer, New York, pp 67–80CrossRefGoogle Scholar
  6. Basak D, Pal S, Patranabis DC (2007) Support vector regression. Neural Inf Process Lett Rev 11(10):203–224Google Scholar
  7. Chen H, Chen X, Zhang DW (2018) Dramatic switching behavior in suspended MoS2 field-effect transistors. Semicond Sci Technol 33(2):024001MathSciNetCrossRefGoogle Scholar
  8. Cho B et al (2015a) Charge-transfer-based gas sensing using atomic-layer MoS2. Sci Rep 5:8052CrossRefGoogle Scholar
  9. Cho Y-H et al (2018) Soft-type trap-induced degradation of MoS2 field effect transistors. Nanotechnology 29(22):22LT01CrossRefGoogle Scholar
  10. Cho B et al (2015b) Charge-transfer-based gas sensing using atomic-layer MoS2. Sci Rep 5:8052CrossRefGoogle Scholar
  11. Choi Y-J et al (2008) Novel fabrication of an SnO2 nanowire gas sensor with high sensitivity. Nanotechnology 19(9):095508CrossRefGoogle Scholar
  12. Fang M et al (2018) Controlled growth of bilayer‐MoS2 films and MoS2‐based field‐effect transistor (FET) performance optimization. Adv Electron Mater 4(4):1700524CrossRefGoogle Scholar
  13. Kauffman DR, Star A (2008) Carbon nanotube gas and vapor sensors. Angew Chem Int Ed 47(35):6550–6570CrossRefGoogle Scholar
  14. Kumar R et al (2018) Growth of MoS2–MoO3 hybrid microflowers via controlled vapor transport process for efficient gas sensing at room temperature. Adv Mater Interfaces 5(10):1800071CrossRefGoogle Scholar
  15. Lee K et al (2013) High-performance sensors based on molybdenum disulfide thin films. Adv Mater 25(46):6699–6702CrossRefGoogle Scholar
  16. Li H et al (2012) Fabrication of single-and multilayer MoS2 film-based field-effect transistors for sensing NO at room temperature. Small 8(1):63–67CrossRefGoogle Scholar
  17. Li J et al (2003) Carbon nanotube sensors for gas and organic vapor detection. Nano Lett 3(7):929–933CrossRefGoogle Scholar
  18. Liu X et al (2018) Design of superior ethanol gas sensor based on indium oxide/molybdenum disulfide nanocomposite via hydrothermal route. Appl Surf Sci 447:49–56CrossRefGoogle Scholar
  19. Liu X et al (2017) Two‐dimensional nanostructured materials for gas sensing. Adv Funct Mater 27(37):1702168CrossRefGoogle Scholar
  20. Lu M-Y et al (2018) Time-evolution of the electrical characteristics of MoS2 field effect transistors after electron beam irradiation. Phys Chem Chem Phys 20(14):9038–9044CrossRefGoogle Scholar
  21. Marin EG et al (2018) First-principles simulations of FETs based on two-dimensional InSe. IEEE Electron Dev Lett 39(4):626–629CrossRefGoogle Scholar
  22. Nayeri M, Moradinasab M, Fathipour M (2018) The transport and optical sensing properties of MoS2, MoSe2, WS2 and WSe2 semiconducting transition metal dichalcogenides. Semicond Sci Technol 33(2):025002CrossRefGoogle Scholar
  23. O’Brien M et al (2014) Plasma assisted synthesis of WS2 for gas sensing applications. Chem Phys Lett 615:6–10CrossRefGoogle Scholar
  24. Radisavljevic B, Whitwick MB, Kis A (2011) Integrated circuits and logic operations based on single-layer MoS2. ACS Nano 5(12):9934–9938CrossRefGoogle Scholar
  25. Ridene S (2018) Large optical gain from the 2D-transition metal dichalcogenides of MoS2/WSe2 quantum wells. Superlattices Microstruct 114:379–385CrossRefGoogle Scholar
  26. Tiwari S et al (2017) Effect of temperature & phonon scattering on the drain current of a MOSFET using SL-MoS2 as its channel material. Superlattices Microstruct 111:912–921CrossRefGoogle Scholar
  27. Wan Q et al (2004) Fabrication and ethanol sensing characteristics of ZnO nanowire gas sensors. Appl Phys Lett 84(18):3654–3656CrossRefGoogle Scholar
  28. Wang S-P, Wu C-H, Hong C-C (2015) MoS2 nanosensors fabricated by dielectrophoretic assembly for ultrasensitive and rapid sensing of volatile organic compounds. In: 2015 IEEE sensorsGoogle Scholar
  29. Xie L et al (2017) Graphene-contacted ultrashort channel monolayer MoS2 transistors. Adv Mater 29(37):1702522CrossRefGoogle Scholar

Copyright information

© Springer-Verlag GmbH Germany, part of Springer Nature 2018

Authors and Affiliations

  • Azar Alizadeh
    • 1
  • Fatemeh Mosalanezhad
    • 2
  • Abdolkarim Afroozeh
    • 3
  • Elnaz Akbari
    • 4
    • 5
    Email author
  • Zolkafle Buntat
    • 6
  1. 1.School of EngineeringUniversity of CaliforniaMercedUSA
  2. 2.Department of ChemistryJahrom Branch, Islamic Azad UniversityJahromIran
  3. 3.Department of EngineeringUniversity of LarestanLarIran
  4. 4.Department for Management of Science and Technology DevelopmentTon Duc Thang UniversityHo Chi Minh CityVietnam
  5. 5.Faculty of Electrical and Electronics EngineeringTon Duc Thang UniversityHo Chi Minh CityVietnam
  6. 6.Institute of High Voltage and High Current, Faculty of Electrical EngineeringUniversiti Teknologi MalaysiaJohor BahruMalaysia

Personalised recommendations