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Microsystem Technologies

, Volume 25, Issue 1, pp 51–55 | Cite as

Design of a packaging-friendly double-topology RF MEMS switch for space applications

  • Evgeny A. SavinEmail author
  • Roman V. Kirtaev
  • Andrey A. Zhukov
  • Pavel I. Didyk
Technical Paper

Abstract

This article presents the results of the research, design and a series of manufacturing steps of an RF-MEMS switch to be used in space communication systems. Design and measurement results are discussed. Double-topology geometry for anodic bonding is presented.

Notes

Acknowledgements

This work has been supported by the Ministry of Education and Science of the Russian Federation under the Federal target program “Research and Development in Priority Directions of the Russian Science and Technology Complex in 2014–2020”; contract no. 14.579.21.0137; unique project identifier RFMEFI57916X0137. Experiments have been performed using the equipment of MIPT Shared Facilities Centre.

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Copyright information

© Springer-Verlag GmbH Germany, part of Springer Nature 2018

Authors and Affiliations

  1. 1.Bazovye Tekhnologii, LLCMoscowRussia
  2. 2.Moscow Institute of Physics and TechnologyDolgoprudnyRussia
  3. 3.Russian Space Systems, JSCMoscowRussia

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