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Design and analysis of a novel MEMS spiral inductor with high quality factor

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Abstract

In this paper a novel spiral inductor with high quality (Q)-factor is presented. Non-uniform current density distribution, especially in inner turn, increases the effective metal resistance due to skin and proximity effect. In order to overcome this problem, an improved inductor layout with non-uniform metal width and non-uniform spacing is proposed to increase the quality factor. For this inductor layout, from outer coil to inner coil, the metal widths are reduced but spacing between strips are increased. Mainly due to the decrease of eddy current loss by weakening the current crowding effect in the center of the spiral inductor. By reducing the current crowding effect, the effective resistance is minimized, thereby increase the quality factor. Simulation has been taken using COMSOL Multiphysics software. The results indicate that maximum value of quality factor and self-inductance of the novel inductor have been obtained about 80.34 and 324 nH, respectively. Which Q-factor improves 27% more than conventional inductors with uniform width. The dimension of the inductor is 1700 × 1660 μm.

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Authors and Affiliations

  1. Department of Electrical Engineering, Babol Noshirvani University of Technology, Babol, Iran

    Bahram Azizollah Ganji & Sanaz Kheiry

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  1. Bahram Azizollah Ganji
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  2. Sanaz Kheiry
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Correspondence to Bahram Azizollah Ganji.

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Azizollah Ganji, B., Kheiry, S. Design and analysis of a novel MEMS spiral inductor with high quality factor. Microsyst Technol 24, 3321–3328 (2018). https://doi.org/10.1007/s00542-018-3914-2

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  • DOI: https://doi.org/10.1007/s00542-018-3914-2

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