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Microsystem Technologies

, Volume 24, Issue 8, pp 3291–3297 | Cite as

Low-cost surface micromachined microhotplates for chemiresistive gas sensors

  • K. G. Girija
  • S. Chakraborty
  • M. Menaka
  • R. K. Vatsa
  • Anita Topkar
Technical Paper
  • 93 Downloads

Abstract

Microhotplate (MHP) based gas sensors have gained significant attention recently due to their small size, low power and feasibility for integration of electronics on the same chip. This study presents the detailed work on design, fabrication and complete characterization of microhotplates based on a standard multi user MEMS process (MUMPs). Suspended-membrane type MHPs were designed using the available layer combinations of MUMPs. FEM simulations were carried out to optimize the heater design by spatially varying the heater current density to achieve uniform temperature distribution over the sensing area. Topography measurements confirmed that the X–Y–Z dimensions of the fabricated MHPs were in accordance with the design. From electro-thermal characterization, the thermal efficiency of the MHPs was evaluated as ~ 10 °C/mW. The suspended membrane showed a homogeneous temperature of ~ 450 °C at 35–40 mW heater power, which was well above the typical operating temperature of chemiresistive gas sensors. The results presented in this paper provide a pathway for realizing cost effective MHPs for gas sensors based on MUMPs.

Notes

Acknowledgements

The authors would like to thank Prof. M. Deshmukh, TIFR for helping in wire-bonding the MHPs. The authors acknowledge the support extended by Mr. Philip Sebin and Mr. Arvind Kumar of Electronics Division, BARC in the characterization of MHPs.

References

  1. Bhattacharyya P, Basu PK, Mondal B, Saha H (2008) A low power MEMS gas sensor based on nanocrystalline ZnO thin films for sensing methane. Microelectron Reliab 48:1772–1779CrossRefGoogle Scholar
  2. Briand D (2013) Micromachined semiconductor gas sensors. In: Jaaniso R, Tan OK (eds) semiconductor gas sensors. Woodhead Publishing Limited, CambridgeGoogle Scholar
  3. Circuits Multi-Projects (2018). http://cmp.imag.fr. Accessed 25 Aug 2014
  4. Eranna G, Joshi BC, Runthala DP, Gupta RP (2004) Oxide materials for development of integrated gas sensors—a comprehensive review. Crit Rev Solid State Mater Sci 29(3):111–118CrossRefGoogle Scholar
  5. Girija KG, Kaur D, Belwanshi V, Vatsa RK, Topkar A (2015) Design and electro-thermal analysis of micro hotplates for chemical sensors using standard multi user MEMS process. In: IEEE Xplore Proceedings of ISPTS-2, 7220075, pp 27–29Google Scholar
  6. Girija KG, Tushir I, Vatsa RK, Topkar A (2017) Design, simulation and fabrication of piezoresistive microcantilevers using standard multi user MEMS process. ISSS J Micro Smart Syst 6:83–89CrossRefGoogle Scholar
  7. Graf M, Barrettino D, Kirstein K, Hierlemann A (2006) CMOS microhotplate sensor system for operating temperatures up to 500 °C. Sens Actuators B 117:346–352CrossRefGoogle Scholar
  8. Kumar A, Eranna G (2016) Design and electro-thermal analysis of surface micromachined perforated membrane hotplate for chemical gas sensor applications. Microsyst Technol 22:2559–2564CrossRefGoogle Scholar
  9. Li M, Zhu WYH, Guo Z, Tang Z (2015) Fabrication and characterization of a low power consumption ethanol gas sensor based on a suspended micro-hotplate. RSC Adv 5:51953–51960CrossRefGoogle Scholar
  10. Pal J, Zhu Y, Dao D, Lu J, Khan F (2015) RF MEMS switches for smart antennas. Microsyst Technol 21:487–495CrossRefGoogle Scholar
  11. Puigcorbe J, Vogel D, Michel B, Vila A, Gracia I, Cane C, Morante JR (2003) Thermal and mechanical analysis of micromachined gas sensors. J Micromech Microeng 13:548–556CrossRefGoogle Scholar
  12. Qu P, Qu H (2013) Design and characterization of a fully differential MEMS accelerometer fabricated using metalMUMPs technology. Sensors 13:5720–5736CrossRefGoogle Scholar
  13. Rao LLR, Singha MK, Subramaniam KM, Jampana N, Asokan S (2016) Molybdenum microheaters for MEMS-based gas sensor applications: fabrication. Electro Thermo Mech Response Charact IEEE Sens J 17:22–29Google Scholar
  14. Samaeifar F, Hajghassem H, Afifi A, Abdollahi H (2015) Implementation of high-performance MEMS platinum micro-hotplate. Sens Rev 35:116–124CrossRefGoogle Scholar
  15. Shakoor RI, Bazaz SA, Burnie M, Lai Y, Hasan MM (2011) Electrothermally actuated resonant rate gyroscope fabricated using the MetalMUMPs. Microelectron J 42:585–593CrossRefGoogle Scholar
  16. Simon I, Barsan N, Bauer M (2001) Micromachined metal oxide gas sensors: opportunities to improve sensor performance. Sens Actuators B 73:1–26CrossRefGoogle Scholar
  17. Spannhake J, Helwig A, Schulz O, Muller G (2009) Micro-fabrication of gas sensors, chapter 1. In: Comini E, Faglia G, Sberveglieri G (eds) Solid state gas sensing. Springer, Boston, MAGoogle Scholar
  18. Vernieres J, Steinhauer S, Zhao J, Chapelle A, Menini P, Dufour N, Diaz RE, Nordlund K, Djurabekova F, Grammatikopoulos P, Sowwan M (2017) Gas phase synthesis of multifunctional Fe-based nanocubes. Adv Funct Mater 27:1605328CrossRefGoogle Scholar
  19. Wang L, Jin Y (2017) A push-pull double-contact MEMS relay fabricated by MetalMUMPs process. Microsyst Technol 23:2257–2262CrossRefGoogle Scholar
  20. Weiller BH, Fuqua PD, Osborn JV (2004) Fabrication, characterization, and thermal failure analysis of a micro hot plate chemical sensor substrate. J Electrochem Soc 151:H59–H65CrossRefGoogle Scholar
  21. Wöllenstein J, Plaza JA, Cane C, Min Y, Böttner H, Tuller HL (2003) A novel single chip thin film metal oxide array. Sens Actuators B 93:350–355CrossRefGoogle Scholar

Copyright information

© Springer-Verlag GmbH Germany, part of Springer Nature 2018

Authors and Affiliations

  1. 1.Chemistry DivisionBhabha Atomic Research CentreMumbaiIndia
  2. 2.Electronics DivisionBhabha Atomic Research CentreMumbaiIndia
  3. 3.Homi Bhabha National InstituteMumbaiIndia
  4. 4.QAD DivisionIndira Gandhi Center for Atomic ResearchChennaiIndia

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