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Microsystem Technologies

, Volume 24, Issue 8, pp 3443–3453 | Cite as

Design and simulation of RF MEMS comb drive with ultra-low pull-in voltage and maximum displacement

  • Salah El Din Nashat
  • Roshdy AbdelRassoul
  • Abd El Moneim Abd El Bary
Technical Paper
  • 190 Downloads

Abstract

Comb drive actuators are very important microelectromechanical systems structures that are widely used in many applications. They are currently used in force balanced accelerometers, resonant accelerometers and resonant gyroscopes, micro-grippers and micro-engines. In addition, they are extensively used in opto-mechanical subsystems such as switches and variable optical attenuators. The goal of this paper is to present a comb drive actuator model design with ultra-low pull-in voltage to achieve large displacement, deriving the exerted forces equations, mechanical analysis and the most important problems, also comparing with the previous work done to treat these problems.

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Copyright information

© Springer-Verlag GmbH Germany, part of Springer Nature 2018

Authors and Affiliations

  • Salah El Din Nashat
    • 1
  • Roshdy AbdelRassoul
    • 1
  • Abd El Moneim Abd El Bary
    • 1
  1. 1.Electronics and Communications Engineering Department, College of Engineering and TechnologyArab Academy for Science, Technology and Maritime TransportAlexandriaEgypt

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