Microsystem Technologies

, Volume 24, Issue 6, pp 2727–2736 | Cite as

PDMS–PMMA bonding improvement using SiO2 intermediate layer and its application in fabricating gas micro valves

  • Ahmad R. Norouzi
  • Alireza NikfarjamEmail author
  • Hassan Hajghassem
Technical Paper


In this study a modified technique is presented for bonding PDMS membrane to PMMA substrate using thin SiO2 intermediate layer to enhance PMMA surface’s hydrophilicity, and increase PMMA stickiness to PDMS via O2 plasma activation. TEOS solution is used to create silica layer on PMMA, and Chloroform is added to sol–gel in order to infuse silica layer to PMMA substrate; this leads to a stronger stickiness of SiO2 layer to PMMA. It is shown that strong and irreversible bond of PMMA which is covered with SiO2 nano particles, to PDMS can be reliably achieved. Furthermore, using this technique, two types of polymeric gas micro valves were fabricated that could cease the gas flow hermetically. Additionally, small solenoid actuators were utilized to control valves which lead to switching from a rather high differential pressure. In order to evaluate bonding and banning capability of the valves, several tests such as strength test and Damming test of the valves were performed. Results of the conducted tests indicate an improvement in PDMS/PMMA bonding strength using TEOS/chloroform solution; moreover, damming pressure of the micro valves, at the best condition, was about 2.5 bars.

Supplementary material

Supplementary material 1 (AVI 25612 kb)

Supplementary material 2 (AVI 32960 kb)

Supplementary material 3 (AVI 44786 kb)


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Copyright information

© Springer-Verlag GmbH Germany, part of Springer Nature 2018

Authors and Affiliations

  1. 1.MEMS & NEMS Laboratory, Faculty of New Sciences and TechnologiesUniversity of TehranTehranIran

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