Microsystem Technologies

, Volume 24, Issue 5, pp 2409–2417 | Cite as

Electro-thermal analysis of an Al–Ti multilayer thin film microheater for MEMS thruster application

  • Xingchen Li
  • Yiyong Huang
  • Xiaoqian Chen
  • Xiangming Xu
  • Dingbang Xiao
Technical Paper
  • 25 Downloads

Abstract

A multilayer thin film aluminum/titanium (Al/Ti) microheater is developed for the microthruster liquid propellant vaporizing and gas heating for increasing the specific impulse. The microheater was fabricated onto a Pyrex 7740 substrate using a Micro-Electro-Mechanical Systems processing technology. A finite-element based multiphysics simulation was employed to simulate the microheater performance. The distribution of temperature and variation of the thermal deformation are simulated in modeling with the different input power. And the simulation shows that heat loss of the microheater is relatively low comparing with the normal heater. Subsequently an experimental testing of the microheater performance based on infrared imaging device was actualized with applied voltage from 5 to 36 V. An auger electron spectroscopy detection was employed to validating the assumption that Al layer oxidizing is the main reason of temperature higher in the test than simulation.

List of symbols

ρ

Material density

q

Heat flux tensor

Cp

Heat capacity at constant pressure

k

Thermal conductivity

Qted

Thermo elastic damping

ds

Thin layer thickness

qs

Thin layer heat flux tensor

ks

Layer heat transfer coefficient

V

Potential difference

σ

Conductivity

Je

External current density tensor

Qj

Current source

T

Temperature

Notes

Acknowledgements

This work is supported by the Major Program of National Natural Science Foundation of China under Grant numbers 61690210 and 61690213.

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Copyright information

© Springer-Verlag GmbH Germany, part of Springer Nature 2017

Authors and Affiliations

  • Xingchen Li
    • 1
  • Yiyong Huang
    • 1
  • Xiaoqian Chen
    • 1
  • Xiangming Xu
    • 2
  • Dingbang Xiao
    • 2
  1. 1.College of Aerospace Science and EngineeringNational University of Defense TechnologyChangshaPeople’s Republic of China
  2. 2.College of Mechatronic Engineering and AutomationNational University of Defense TechnologyChangshaPeople’s Republic of China

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