Development of new electrostatic micro cam system driven by elastic wings
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In this paper, we improve and develop a micro cam system, in which reciprocating linear movement of two electrostatic linear comb-drive actuators (ELCA) is transformed into the unilateral rotation of a cam rim through six elastic wings of motion-transmission mechanisms. The system was fabricated by using SOI-MEMS technology and only one photo mask. Our experimental results show that the new micro cam system runs stably while the driving frequency ranging from 1 to 30 Hz with the driving voltage V pp = 100 V. In addition, the average angular velocities of the cam rim matched with the theoretical results better than the velocities measured in the previous micro cam system.
KeywordsGear Pair Driving Frequency Movable Part Comb Finger Suspension Beam
This research is funded by Vietnam National Foundation for Science and Technology Development (NAFOSTED) under Grant Number 107.01-2015.18.
Compliance with ethical standards
Conflict of interest
The Authors declare that they have no conflict of interest.
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