Microsystem Technologies

, Volume 23, Issue 12, pp 5669–5675 | Cite as

Development of new electrostatic micro cam system driven by elastic wings

  • Phuc Hong Pham
  • Lam Bao Dang
  • Viet Hoang Nguyen
  • Van Thanh Dau
Technical Paper


In this paper, we improve and develop a micro cam system, in which reciprocating linear movement of two electrostatic linear comb-drive actuators (ELCA) is transformed into the unilateral rotation of a cam rim through six elastic wings of motion-transmission mechanisms. The system was fabricated by using SOI-MEMS technology and only one photo mask. Our experimental results show that the new micro cam system runs stably while the driving frequency ranging from 1 to 30 Hz with the driving voltage V pp  = 100 V. In addition, the average angular velocities of the cam rim matched with the theoretical results better than the velocities measured in the previous micro cam system.


Gear Pair Driving Frequency Movable Part Comb Finger Suspension Beam 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.



This research is funded by Vietnam National Foundation for Science and Technology Development (NAFOSTED) under Grant Number 107.01-2015.18.

Compliance with ethical standards

Conflict of interest

The Authors declare that they have no conflict of interest.


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Copyright information

© Springer-Verlag Berlin Heidelberg 2017

Authors and Affiliations

  • Phuc Hong Pham
    • 1
    • 2
  • Lam Bao Dang
    • 1
  • Viet Hoang Nguyen
    • 1
  • Van Thanh Dau
    • 3
  1. 1.School of Mechanical EngineeringHanoi University of Science and Technology (HUST)HanoiVietnam
  2. 2.Vietnam-Japan International Institute for Science of TechnologyHUSTHanoiVietnam
  3. 3.Research Group (Environmental Health)Sumitomo Chemical. LtdHyogoJapan

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