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Microsystem Technologies

, Volume 23, Issue 12, pp 5397–5406 | Cite as

Characterization of basket-forceps-type micro-flow-sensor for breathing measurements in small airway

  • Naoaki Harada
  • Yoshihiro Hasegawa
  • Ryota Ono
  • Miyoko Matsushima
  • Tsutomu Kawabe
  • Mitsuhiro ShikidaEmail author
Technical Paper

Abstract

We previously proposed a basket-forceps-type flow sensor, in which a flexible thermal flow sensor is mounted onto basket forceps to fix the flow sensor onto the inside surface of the airway. The basket-forceps-type flow sensor has an asymmetrical structure to prevent reciprocating airflow; thus, we investigated the characteristics of the basket-forceps-type flow sensor under both expired- and inspired-airflow conditions in this study. The thermal flow sensor was fabricated on a flexible polyimide film and mounted onto a guide tube of a basket-forceps. Two heaters and their electrical wiring patterns were designed to produce symmetric heat distribution over the heaters. The effects of the basket structure and guide tube on flow-rate measurement were experimentally evaluated, and it was confirmed that they did not affect sensor output. Conversely, sensor output decreased with the increase in tube diameter due to the reduction in the average flow velocity with the diameter increase. Thus, we carried out a procedure to construct a calibration curve under an arbitrary tube diameter. Finally, we applied the basket-forceps-type flow sensor in an animal experiment in which it successfully detected the breathing properties in the airway of a rat.

Keywords

Chronic Obstructive Pulmonary Disease Tube Diameter Sensor Output Flow Sensor Guide Tube 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

Notes

Acknowledgements

This research was supported by The Canon Foundation and JSPS KAKENHI Grant Number 26286034, Japan.

References

  1. Campbell PK, Jones KE, Huber RJ, Horch KW, Normann RA (1991) A silicon-based, three-dimensional neural interface: manufacturing process for an intracortical electrode array. IEEE Trans Biomed Eng 38(8):758–768CrossRefGoogle Scholar
  2. Elwenspoek M, Wiegerink R (2001) Mechanical microsensors. Springer, BerlinCrossRefGoogle Scholar
  3. Gianchandani Y, Tabata O, Zappe H (2008) Comprehensive MEMS, 2, flow sensor. Elsevier, Amsterdam, pp 209–272Google Scholar
  4. Harada N, Ono R, Matsushima M, Kawabe T, Shikida M (2015) Basket forceps with flow sensor for evaluating breathing characteristics in small airway. In: The 18th International Conference on Solid-State Sensors, Actuators and Microsystems, pp 1743–1746Google Scholar
  5. Harada N, Ono R, Matsushima M, Kawabe T, Hasegawa Y, Shikida M (2016) Micro flow sensor integration onto basket forceps for pulmonary function evaluation. In: Proceedings of the 11th IEEE International Conference on Nano/Micro Engineered and Molecular systems, C1L-A-3 (#1194)Google Scholar
  6. Hasegawa Y, Harada N, Matsushima M, Kawabe T, Shikida M (2016) Effect of guide tube length on sensor output in inspired airflow measurement. In: The 29th International Microprocesses and Nanotechnology Conference, 11D-10-4Google Scholar
  7. Henry S, McAllister DV, Allen MG, Prausnitz MR (1998) Micromachined needles for the transdermal delivery of drugs. In: Proceedings of Micro Electro Mechanical Systems Workshop, pp 494–498Google Scholar
  8. Kawaoka H, Yamada T, Matsushima M, Kawabe T, Shikida M (2015a) Detection of both heartbeat and respiration signals from airflow at mouth by using single catheter flow sensor. In: The 18th International Conference on Solid-State Sensors, Actuators and Microsystems, pp 1755–1758Google Scholar
  9. Kawaoka H, Yamada T, Matsushima M, Kawabe T, Hasegawa Y, Shikida M (2015b) Extraction of heartbeat signal from airflow at mouth by flow sensor. Proc IEEE Sens 2015:279–282Google Scholar
  10. King LV (1914) On the convection of heat from small cylinders in a stream of fluid: fetermination of the convection constants of small platinum wires with applications to hot-wire anemometry. Philos Trans R Soc Lond Ser A Contain Papers Math Phys Character 214:373–432CrossRefGoogle Scholar
  11. Kusuda S, Sawano S, Konishi S (2007) Fluid-resistive bending sensor having perfect compatibility with flexible pneumatic balloon actuator. In: Proceedings of Micro Electro Mechanical Systems Conference, pp 615–618Google Scholar
  12. Leonardi M, Leuenberger P, Bertrand D, Bertsch A, Renaud PH (2003) A soft contact lens with a MEMS strain gage embedded for intraocular pressure monitoring. In: The 12th International Conference on Solid State Sensors, Actuators and Microsystems, pp 1043–1046Google Scholar
  13. Najafi K, Wise K (1985) A high-yield IC-compatible multichannel recording array. IEEE Trans Electron Devices ED 32(7):1206–1211CrossRefGoogle Scholar
  14. Roxhed N, Griss P, Stemme G (2005) Reliable in vivo penetration and transdermal injection using ultra-sharp hollow microneedles. In: Tech. Digest of International Conference on Solid-State Sensors and Actuators, pp 213–216Google Scholar
  15. Seidl K, Lemke B, Ramirez H, Herwik S, Ruther P, Paul O (2010) CMOS-based high-density silicon microprobe for stress mapping in intracortical applications. In: Tech. Digest. The 23th International Conference on Micro Electro Mechanical Systems, pp 35–38Google Scholar
  16. Shikida M, Naito J, Yokota T, Kawabe T, Hayashi Y, Sato K (2009) A catheter-type flow sensor for measurement of aspirated- and inspirited-air characteristics in the bronchial region. J Micromech Microeng 19:105027CrossRefGoogle Scholar
  17. Shikida M, Yokota T, Kawabe T, Funaki T, Matsushima M, Iwai S, Matsunaga N, Sato K (2010) Characteristics of an optimized catheter-type thermal flow sensor for measuring reciprocating airflows in bronchial pathways. J Micromech Microeng 20:125030CrossRefGoogle Scholar
  18. Shikida M, Kitamura S, Miyake C, Bessho K (2014a) Micromachined pyramidal shaped biodegradable microneedle and its skin penetration capability. Microsyst Technol 20:2239–2245CrossRefGoogle Scholar
  19. Shikida M, Shikano T, Matsuyama T, Yamazaki Y, Matsushima M, Kawabe T (2014b) Micromachined catheter flow sensor and its applications in breathing measurements in animal experiments. Microsyst Technol 20:505–513CrossRefGoogle Scholar
  20. Trautmann A, Heuck F, Denfeld R, Ruther P, Paul O (2006) Detachable silicon microneedle stamps for allergy skin prick testing. In: Proceedings of Micro Electro Mechanical Systems Conference, pp 434–437Google Scholar
  21. Watanabe Y, Maeda M, Yaji N, Nakamura R, Iseki H, Yamato M, Okano T, Hori S, Konishi S (2007) Small, soft, and safe microactuator for retinal pigment epithelium transplantation. In: Proceedings of Micro Electro Mechanical Systems Conference, pp 659–662Google Scholar

Copyright information

© Springer-Verlag Berlin Heidelberg 2017

Authors and Affiliations

  1. 1.Department of Frontier SciencesHiroshima City UniversityHiroshimaJapan
  2. 2.Department of Biomedical SciencesHiroshima City UniversityHiroshimaJapan
  3. 3.Department of Mechanical Science EngineeringNagoya UniversityNagoyaJapan
  4. 4.Department of Medical TechnologyNagoya UniversityNagoyaJapan

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