Microsystem Technologies

, Volume 23, Issue 1, pp 125–133 | Cite as

Novel shock wave excitation method for dynamic characterization of microstructures

  • Dongsheng She
  • Yiliu Yang
  • Zefei Wei
  • Kun Li
  • Zhen Yu
  • Feng Ding
Technical Paper
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Accepted:
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Abstract

A novel shock wave excitation method for dynamic characterization of MEMS microstructures was proposed. A typical shock wave excitation device mainly includes a needle electrode, a plate electrode, a high-voltage capacitor, a base structure and a feeder. The principle of this method is as follows. The testing microstructure was installed on the surface of the base structure supported by a rigid platform. The plate electrode was attached on the opposite surface. The needle electrode was mounted on the feeder. Adjusting the feeder, the shock wave will be generated as soon as the gap distance between two electrodes meets the requirements of electrical discharging. The base structure will be impacted by the shock wave. Thus the testing microstructure will be excited by the movement of the base structure. A dynamic measurement system for microcantilevers were developed. In the system, the shock wave excitation device was used to excite the testing microcantilevers. T-shaped piezoresistive microcantilevers were fabricated to get the vibration response. The experiments on the dynamic characteristics measurement for microcantilevers were carried out. The results show the shock wave excitation method is effective for MEMS dynamic characterization.

Keywords

Shock Wave Extracorporeal Shock Wave Lithotripsy Needle Electrode Plate Electrode Excitation Method 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.
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Notes

Acknowledgments

This work was supported by the National Natural Science Foundation of China (Grant No. 51305191) and the General Project of Liaoning Provincial Education Department of China (Grant No. L2015009).

Compliance with ethical standards

Conflict of interest

The authors declared that they have no conflicts of interest to this work.

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Copyright information

© Springer-Verlag Berlin Heidelberg 2015

Authors and Affiliations

  • Dongsheng She
    • 1
  • Yiliu Yang
    • 2
  • Zefei Wei
    • 1
  • Kun Li
    • 1
  • Zhen Yu
    • 1
  • Feng Ding
    • 3
  1. 1.College of EngineeringBohai UniversityJinzhou CityChina
  2. 2.Research and Teaching Institute of College Computer ScienceBohai UniversityJinzhou CityChina
  3. 3.School of Software TechnologyDalian University of TechnologyDalian CityChina

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