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Microsystem Technologies

, Volume 21, Issue 7, pp 1543–1549 | Cite as

Laser moulding, a new low-cost fabrication process for micro- and nanostructured components

  • Markus Wissmann
  • Heino Besser
  • Markus Beiser
  • Wilhelm Pfleging
Technical Paper

Abstract

Laser moulding is a new polymer moulding process developed and enhanced for the fabrication of micro- and nanostructured components at the Karlsruhe Institute of Technology. This report describes the potential offering by laser moulding. Besides known polymer moulding techniques like injection moulding or hot embossing, laser moulding can also achieve significant advantages compared to the existing technologies. Assisted by a high power diode laser radiation (wavelength 940 nm) a micro- or nanostructure of a mould will be transferred to a thermoplastic polymer product. With regard to the efficiency of production, micro- and nanostructures should be fast, competitive and flexibly transferred to a thermoplastic polymer surface. For this purpose the moulding by laser radiation provides ideal conditions, advantages and a variety of applications. These conditions, advantages and applications were tested by using different micro- or nanostructured mould inserts made of silicon, glass or nickel as well as different thermoplastic polymers which were used for replication such as, polymethylmethacrylate, polystyrene, cyclo-olefin copolymers and polyether ketones. The new technical approach and his first results will be described in this report.

Keywords

PMMA Scanning Step Mould Insert Moulding Process Glass Wafer 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

Notes

Acknowledgments

This work was supported by the Karlsruhe Nano Micro Facility (KNMF, http://www.knmf.kit.edu/).

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Copyright information

© Springer-Verlag Berlin Heidelberg 2014

Authors and Affiliations

  • Markus Wissmann
    • 1
  • Heino Besser
    • 2
  • Markus Beiser
    • 2
  • Wilhelm Pfleging
    • 2
    • 3
  1. 1.Institute for Microstructure TechnologyKarlsruhe Institute of TechnologyEggenstein-LeopoldshafenGermany
  2. 2.Institute for Applied Materials–Applied Materials PhysicsKarlsruhe Institute of TechnologyEggenstein-LeopoldshafenGermany
  3. 3.Karlsruhe Nano Micro FacilityEggenstein-LeopoldshafenGermany

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