Infrared heated μ-blistering, a new fabrication technology for HARMST
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Polymeric replication technologies such as injection moulding or hot-embossing have gained wide acceptance in the microtechnological community, microthermoforming of thin polymer foils, also called μ-blistering, still remains relatively unknown. Although the general potentials of the µ-blistering have already been pointed out, little work has been carried out addressing its capability for high aspect ratio microstructuring. In the scope of this work we therefore demonstrate the feasibility of μ-blistering to obtain aspect ratios for free standing structures of up to 7 within a process cycle time of <4 min. The presented processing technology uniquely combines manufacturing of macro-, micro- and even nanoscopic feature sizes in a single process.
KeywordsHigh Aspect Ratio Silicone Rubber Draw Ratio Mould Insert Master Mould
We would like to thank the Laboratory for MEMS Applications at IMTEK (Freiburg), for kindly providing a master for microfluidic applications and Gabi Gruetzner of micro resist technology GmbH (Berlin) for provision of the ultra-thick dry-film resist prototype.
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