Advertisement

Microsystem Technologies

, Volume 20, Issue 4–5, pp 743–749 | Cite as

Compact optical position feedback scheme for MOEMS mirrors

  • Andreas TortschanoffEmail author
  • M. Baumgart
  • D. Holzmann
  • M. Lenzhofer
  • T. Sandner
  • A. Kenda
Technical Paper

Abstract

Recently, we have realized a novel, very compact position sensing device for MOEMS mirrors, which is based on the measurement of a reflected light beam with a quadrant diode. This scheme is applicable to arbitrary trajectories and in this work we present the characteristics of this device, showing experimental results obtained with a test set-up, but also theoretical considerations and optical ray-tracing simulations.

Keywords

Central Hole Deflection Angle Mirror Surface Position Detection Position Feedback 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

Notes

Acknowledgments

CTR is funded within the R&D Program COMET, Competence Centers for Excellent Technologies by the Federal Ministries of Transport, Innovation and Technology (BMVIT), of Economics and Labour (BMWA) and it is managed on their behalf by the Austrian Research Promotion Agency (FFG). The Austrian provinces (Carinthia and Styria) provide additional funding. Funding and cooperation with all scientific and industrial partners involved in the 7th framework project “TACO” (grant agreement no. 248623) is gratefully acknowledged.

References

  1. Baumgart M, Tortschanoff A (2013a) Theoretical aspects in the design of optical angular position sensing of tiltable mirrors. Int J Optomechatronics 7:193CrossRefGoogle Scholar
  2. Baumgart M, Tortschanoff A (2013b) Design rules for a compact and low-cost optical position sensing of MOEMS tilt mirrors based on a Gaussian-shaped light source. Proc SPIE 8789:87890ACrossRefGoogle Scholar
  3. Borovic B, Liu AQ, Popa D, Cai H, Lewis FL (2005) Open-loop versus closed-loop control of MEMS devices: choices and issues. J Micromech Microeng 15:1917CrossRefGoogle Scholar
  4. Jung D, Sandner T, Kallweit D, Schenk H (2012) Vertical comb drive microscanners for beam steering, linear scanning and laser projection applications. Proc SPIE 8252:82520UCrossRefGoogle Scholar
  5. Kiang MH, Solgaard O, Muller RS, Lau KY (1996) Micromachined polysilicon microscanners for barcode readers. IEEE Photon Technol Lett 8:1707–1709CrossRefGoogle Scholar
  6. Kobayashi T, Tsaur J, Maeda R (2005) Fabrication of optical micro scanner driven by PZT actuators. Jpn J Appl Phys 4:7078CrossRefGoogle Scholar
  7. Milanovic V, Matus GA, McCormick DT (2004) Gimbal-less monolithic silicon actuators for tip-tilt-piston micromirror applications. IEEE J Sel Top Quantum Electron 10:462CrossRefGoogle Scholar
  8. Sandner T, Jung D, Kallweit D, Grasshoff T, Schenk H (2011) Microscanner with vertical out of plane combdrive. In: Proceedings of the International Conference on Optical MEMS and Nanophotonics (OMN) 1: 33–34 Google Scholar
  9. Tortschanoff A, Lenzhofer M, Frank A, Wildenhain M, Sandner T, Schenk H, Scherf W, Kenda A (2010) Position encoding and phase control of resonant MOEMS mirrors. Sens Actuators A 162:235–240CrossRefGoogle Scholar
  10. Yalcinkaya AD, Urey H, Brown D, Montague T, Sprague R (2006) Two-axis electromagnetic microscanner for high resolution displays. IEEE J Microelectromechanical Syst 15:786–794CrossRefGoogle Scholar
  11. Zimmer F, Grueger H, Heberer A, Wolter A, Schenk H (2004) Development of a NIR micro spectrometer based on a MOEMS scanning grating. Proc SPIE 5455:9CrossRefGoogle Scholar

Copyright information

© Springer-Verlag Berlin Heidelberg 2013

Authors and Affiliations

  • Andreas Tortschanoff
    • 1
    Email author
  • M. Baumgart
    • 1
  • D. Holzmann
    • 1
  • M. Lenzhofer
    • 1
  • T. Sandner
    • 2
  • A. Kenda
    • 1
  1. 1.Carinthian Tech Research AGVillachAustria
  2. 2.Fraunhofer Institute for Photonic MicrosystemsDresdenGermany

Personalised recommendations