Microsystem Technologies

, Volume 20, Issue 4–5, pp 743–749 | Cite as

Compact optical position feedback scheme for MOEMS mirrors

  • Andreas TortschanoffEmail author
  • M. Baumgart
  • D. Holzmann
  • M. Lenzhofer
  • T. Sandner
  • A. Kenda
Technical Paper


Recently, we have realized a novel, very compact position sensing device for MOEMS mirrors, which is based on the measurement of a reflected light beam with a quadrant diode. This scheme is applicable to arbitrary trajectories and in this work we present the characteristics of this device, showing experimental results obtained with a test set-up, but also theoretical considerations and optical ray-tracing simulations.


Central Hole Deflection Angle Mirror Surface Position Detection Position Feedback 
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CTR is funded within the R&D Program COMET, Competence Centers for Excellent Technologies by the Federal Ministries of Transport, Innovation and Technology (BMVIT), of Economics and Labour (BMWA) and it is managed on their behalf by the Austrian Research Promotion Agency (FFG). The Austrian provinces (Carinthia and Styria) provide additional funding. Funding and cooperation with all scientific and industrial partners involved in the 7th framework project “TACO” (grant agreement no. 248623) is gratefully acknowledged.


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Copyright information

© Springer-Verlag Berlin Heidelberg 2013

Authors and Affiliations

  • Andreas Tortschanoff
    • 1
    Email author
  • M. Baumgart
    • 1
  • D. Holzmann
    • 1
  • M. Lenzhofer
    • 1
  • T. Sandner
    • 2
  • A. Kenda
    • 1
  1. 1.Carinthian Tech Research AGVillachAustria
  2. 2.Fraunhofer Institute for Photonic MicrosystemsDresdenGermany

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