Technology of ultralong deep brain fluidic microelectrodes combined with etching-before-grinding
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This paper presents a combined fabrication technique that is based on some recent advances in silicon microengineering. Buried microchannels in ultralong silicon microelectrodes thinned by etching-before grinding technology offers novel functional microdevices in the field of neural interfaces. Providing injection, sampling and electrical recording—all integrated monolithically in a long and subsequently thinned silicon microelectrode—extends translational research in fundamental neuroscience due to reduced microelectrode dimensions and functionality like stimulation and recording in deep brain region of cats or apes.
KeywordsNervous System Disorder Neural Interface SiH2Cl2 Fluidic Functionality SiNx Film
The author is grateful to the supportive staff of MTA TTK MFA MEMS Lab. and the Postdoctoral Fellowship Program of Hungarian Academy of Sciences. The inspiration of Örs Fekete is highly acknowledged.
- BRAIN Initiative (US). www.nih.gov/science/brain/
- DISCO GmbH Dicing-Grinding Service. www.dicing-grinding.com/
- Human Brain Project (EU). www.humanbrainproject.eu
- Márton G, Fekete Z, Fiath R, Baracskay P, Ulbert I, Juhasz G, Battistig G, Pongracz A (2013) In vivo measurements with robust silicon-based multielectrode arrays with extreme shaft lengths. IEEE Sens. doi: 10.1109/JSEN.2013.2260325
- Perretta G (2009) Non-human primate models in neuroscience research. Scand J Lab Anim Sci 36:77–85Google Scholar
- Pongrácz A, Fekete Z, Márton G, Bérces ZS, Ulbert I, Fürjes P (2013) Deep-brain silicon multielectrodes for simultaneous in vivo neural recording and drug delivery. Sens Act B. doi: 10.1016/j.snb.2013.01.032
- Takyu S, Kurosawa T, Shimizu N, Harada S (2006) Novel wafer dicing and chip thinning technologies realizing high chip strength. MRS Proceedings, 970. pp. 0970-Y06-05, 2006Google Scholar
- Wise KD, Sodagar M, Yao Y, Gulari MN, Perlin GE, Najafi K (2008) Microelectrodes, microelectronics, and implantable neural microsystems. In: Proceedings of the IEEE, vol. 96. pp 1184–1202Google Scholar