Microsystem Technologies

, Volume 20, Issue 3, pp 403–411 | Cite as

Experimental verification of frequency decoupling effect on acceleration sensitivity in tuning fork gyroscopes using in-plane coupled resonators

  • Praveen Singh Thakur
  • Koji Sugano
  • Toshiyuki Tsuchiya
  • Osamu Tabata
Technical Paper


The effect of in- and anti-phase mode decoupling on the frequency response of coupled in-plane resonators was examined, experimentally, to suppress the acceleration sensitivity (acceleration output) in tuning fork gyroscopes (TFGs). Finite element simulations, conducted in our recent works, show that the origin of acceleration sensitivity for the sensing resonators in TFGs lies in the transduction of linear (in-phase) acceleration to anti-phase resonant vibration of the sensing resonators in TFGs. We further revealed that the frequency decoupling of the in- and anti-phase vibration modes is effective in suppressing the transduction. To experimentally validate this, two types of coupled resonators (one coupled with a frame and the other with a spring) to represent the sensing resonators of TFGs were fabricated on silicon-on-insulator wafer. Different resonant frequencies were used to evaluate the frequency decoupling effect on the coupled resonators, i.e., the coupling from in-phase mode oscillation to the anti-phase mode vibration. The vibration amplitude of the anti-phase mode increased in the coupled resonators with small frequency decoupling (decoupling ratio, DR) value. Additionally, the two types of coupled resonators exhibit similar output after considering the effect of decoupling ratio, anti-phase frequency and different stiffness unbalances. Our results reveal that TFG can be designed with lower acceleration sensitivity by utilizing sense resonators with large decoupling ratio, higher anti-phase frequency, and possessing structures which are insensitive to fabrication imperfections.


Linear Acceleration Couple Resonator Acceleration Output Fabrication Error Suspension Spring 


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Copyright information

© Springer-Verlag Berlin Heidelberg 2013

Authors and Affiliations

  • Praveen Singh Thakur
    • 1
  • Koji Sugano
    • 1
  • Toshiyuki Tsuchiya
    • 1
  • Osamu Tabata
    • 1
  1. 1.Department of Micro Engineering, Graduate School of EngineeringKyoto UniversityKyotoJapan

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