Design and simulation of a novel metallic microgripper using vibration to release nano objects actively
In this study, we investigate a novel metallic microgripper which is able to grasp and transport nano particles (nano tubes/wires) and release them on desirable substrate by vibrating the gripper arms. This microgripper consists of a chevron actuator to grip nano object electrothermally and interdigited comb drive systems to generate vibration at the gripper arms electrostatically. Metallic (nickel) properties enable the chevron actuator to close the gap and pick the nano particle at low voltage and temperature. In order to reduce the out of plane bending during operation and also increase the gripping force, thickness of the nickel layer must be increased, hence electroplating process is proposed for deposition of nickel layer. To generate vibration at the end effectors, comb drive systems are stimulated by applying two voltage signals at desired resonant frequency to the stators. Practically, by sweeping the frequency of these signals around the resonant frequency the end effectors start vibrating. The vibration results in overcoming the adhesion forces due to inertial effects.
KeywordsResonant Frequency Adhesion Force Spring Constant Grip Force Polysilicon
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