Microsystem Technologies

, Volume 20, Issue 1, pp 65–72 | Cite as

Design and simulation of a novel metallic microgripper using vibration to release nano objects actively

  • Hamed Demaghsi
  • Hadi Mirzajani
  • Habib Badri Ghavifekr
Technical Paper


In this study, we investigate a novel metallic microgripper which is able to grasp and transport nano particles (nano tubes/wires) and release them on desirable substrate by vibrating the gripper arms. This microgripper consists of a chevron actuator to grip nano object electrothermally and interdigited comb drive systems to generate vibration at the gripper arms electrostatically. Metallic (nickel) properties enable the chevron actuator to close the gap and pick the nano particle at low voltage and temperature. In order to reduce the out of plane bending during operation and also increase the gripping force, thickness of the nickel layer must be increased, hence electroplating process is proposed for deposition of nickel layer. To generate vibration at the end effectors, comb drive systems are stimulated by applying two voltage signals at desired resonant frequency to the stators. Practically, by sweeping the frequency of these signals around the resonant frequency the end effectors start vibrating. The vibration results in overcoming the adhesion forces due to inertial effects.


Resonant Frequency Adhesion Force Spring Constant Grip Force Polysilicon 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.


  1. Acar C, Shkel A (2009) MEMS vibratory gyroscopes: structural approaches to improve robustness. Springer, New YorkCrossRefGoogle Scholar
  2. Andersen KN, Petersen DH, Carlson K, Molhave K, Sardan O, Horsewell A, Eichhorn V, Fatikow S, Boggild P (2009) Multimodal electrothermal silicon microgrippers for nanotube manipulation. Nanotechnol IEEE Trans 8:76–85CrossRefGoogle Scholar
  3. Arai F, Andou D, Fukuda T (1996) Adhesion forces reduction for micro manipulation based on micro physics. In: Paper presented at the IEEE conference, San Diego, CA, Feb 1996Google Scholar
  4. Carlson K, Andersen KN, Eichhorn V, Petersen DH, Molhave K, Bu IYY, Teo KBK, Milne WI, Fatikow S, Boggild P (2007) A carbon nanofibre scanning probe assembled using an electrothermal microgripper. Nanotechnol IEEE Trans 18:345–501Google Scholar
  5. Chen BK, Zhang Y, Sun Y (2009) Active release of microobjects using a MEMS microgripper to overcome adhesion forces. J Microelectromech Syst 18:652–659CrossRefGoogle Scholar
  6. Chen T, Chen L, Sun L, Rong W, Yang Q (2010) Micro manipulation based on adhesion control with compound vibration. In: Paper presented at the International Conference on Intelligent Robots and Systems, Taipei, Taiwan, 18–22 October 2010Google Scholar
  7. Demaghsi H, Mirzajani H, Atashzaban E, Ghavifekr HB (2012) Design and simulation of a microgripper with the ability of releasing nano particles by vibrating end-effectors. J Sens Transducers 144:131–142Google Scholar
  8. Fang Y, Tan X (2006) A dynamic JKR model with application to vibrational release in micromanipulation. In: Paper presented at the Intelligent Robots and Systems Beijing, 9–15 October 2006Google Scholar
  9. Kataoka K, Kawamura S, Itoh T, Ishikawa K, Honma H, Suga T (2003) Electroplating Ni micro-cantilevers for low contact-force IC probing. Sens Actuators A Phys 103:116–121CrossRefGoogle Scholar
  10. Kim CJ, Pisano AP, Muller RS, Lim MG (1992) Polysilicon microgripper. Sens Actuators A Phys 33:221–227CrossRefGoogle Scholar
  11. Kim K, Liu X, Zhang Y, Sun Y (2008) Nanonewton force-controlled manipulation of biological cells using a monolithic MEMS microgripper with two-axis force feedback. J Micromech Microeng 18:055013CrossRefGoogle Scholar
  12. Park DSW, Nallani AK, Cha D, Lee GS, Kim JM, Skidmore G, Lee JB, Lee JS (2012) Sub-micron metallic electrothermal gripper. J Microsyst Technol 16:367–373CrossRefGoogle Scholar
  13. Riaz K, Bazaz SA, Saleem MM, Shakoor RI (2011) Design, damping estimation and experimental characterization of decoupled 3-DoF robust MEMS gyroscope. Sens Actuators A Phys 172:523–532CrossRefGoogle Scholar

Copyright information

© Springer-Verlag Berlin Heidelberg 2013

Authors and Affiliations

  • Hamed Demaghsi
    • 1
  • Hadi Mirzajani
    • 1
  • Habib Badri Ghavifekr
    • 1
  1. 1.Faculty of Electrical EngineeringSahand University of TechnologyTabrizIslamic Republic of Iran

Personalised recommendations