Microsystem Technologies

, Volume 19, Issue 5, pp 749–755 | Cite as

An adsorption-based mercury sensor with continuous readout

  • Milija SarajlićEmail author
  • Zoran G. Đurić
  • Vesna B. Jović
  • Srđan P. Petrović
  • Dragana S. Đorđević
Technical Paper


A novel readout procedure for a mercury sensor has been proposed. The sensor is based on the surface adsorption. Mercury vapor is adsorbed at the surface of a thin gold layer patterned into four meanders which are connected into a Wheatstone bridge configuration. Sensing is achieved by the resistivity change of the gold film during mercury adsorption. Direct output from the sensor is electric voltage. It takes an additional procedure to convert voltage to mercury concentration. This type of sensor is improved by introducing continuous readout procedure for the voltage–concentration conversion. By using this readout procedure it is possible to monitor mercury vapor concentration as a function of time. Readout is based on the Langmuir time–dependent adsorption theory. This paper illustrates a practical implementation of the new readout procedure.


Mercury Concentration Sensor Chip Mercury Vapor Wire Bonding Wheatstone Bridge 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.



This work was supported by the Ministry of Education and Science of Republic of Serbia, Contract No. TR 32008 of 2011.


  1. Bakshi AV, Bakshi UA (2007) Electronic measurements and instrumentation. Technical Publications, PuneGoogle Scholar
  2. Brown RH (2000) Monitoring the ambient environment with diffusive samplers: theory and practical considerations. J Environ Monit 2:1–9CrossRefGoogle Scholar
  3. Butt HJ, Graf K, Kappl M (2006) Physics and chemistry of interfaces. Wiley, Berlin, pp 185–188Google Scholar
  4. EPA, EPA’s Roadmap for Mercury (2006) Accessed 31 May 2012
  5. EU, European Commission Directorate-General Environment Contract: ENV.G.2/ETU/2007/0021 (2008) Options for reducing mercury use in products and applications, and the fate of mercury already circulating in society Final ReportGoogle Scholar
  6. Langmuir I (1918) The adsorption of gases on plane surfaces of glass mica and platinum. J Am Chem Soc 40:1361CrossRefGoogle Scholar
  7. Mattoli V, Mazzolai B, Raffa V, Mondini A, Dario P (2007) Design of a new real-time dosimeter to monitor personal exposure to elemental gaseous mercury. Sens Actuators B 123:158–167CrossRefGoogle Scholar
  8. McNerney JJ, Buseck PR, Hanson RC (1972) Mercury detection by means of thin gold films. Sci New Ser 178(4061):611–612Google Scholar
  9. Mercury Instruments USA, Accessed 31 May 2012
  10. Pandey SK, Kim KH, Brown RJC (2011) Measurement techniques for mercury species in ambient air. Trends Anal Chem 30:899CrossRefGoogle Scholar
  11. Pirrone N, Cinnirella S, Feng X, Finkelman RB, Friedli HR, Leaner J, Mason R, Mukherjee AB, Stracher G, Streets DG, Telmer K (2009) Global mercury emissions to the atmosphere from natural and anthropogenic sources. In: Pirrone N, Mason R (eds) Mercury fate and transport in the global atmosphere. Springer, Dordrecht, Heidelberg, London, New York, pp 3–50Google Scholar
  12. Schambach K, Eden K, Schumacher K, Wiegleb G (2002) Micromachined Mercury sensor. Proceedings of the 32th European solid-state device Research Conference (ESSDERC 2002) 24–26 September 2002 Firenze, ItalyGoogle Scholar
  13. Toda K, Ochi K, Sanemasa I (1996) NO-sensing properties of Au thin film. Sens Actuators B 32:15–18CrossRefGoogle Scholar

Copyright information

© Springer-Verlag Berlin Heidelberg 2012

Authors and Affiliations

  • Milija Sarajlić
    • 1
    Email author
  • Zoran G. Đurić
    • 3
  • Vesna B. Jović
    • 1
  • Srđan P. Petrović
    • 2
  • Dragana S. Đorđević
    • 2
  1. 1.University of Belgrade, IHTM Center for Microelectronic Technologies and Single CrystalBelgradeSerbia
  2. 2.University of Belgrade, IHTM Center for ChemistryBelgradeSerbia
  3. 3.Institute of Technical Sciences of the Serbian Academy of Sciences and ArtsBelgradeSerbia

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