Microsystem Technologies

, Volume 19, Issue 5, pp 749–755

An adsorption-based mercury sensor with continuous readout

  • Milija Sarajlić
  • Zoran G. Đurić
  • Vesna B. Jović
  • Srđan P. Petrović
  • Dragana S. Đorđević
Technical Paper

DOI: 10.1007/s00542-012-1679-6

Cite this article as:
Sarajlić, M., Đurić, Z.G., Jović, V.B. et al. Microsyst Technol (2013) 19: 749. doi:10.1007/s00542-012-1679-6

Abstract

A novel readout procedure for a mercury sensor has been proposed. The sensor is based on the surface adsorption. Mercury vapor is adsorbed at the surface of a thin gold layer patterned into four meanders which are connected into a Wheatstone bridge configuration. Sensing is achieved by the resistivity change of the gold film during mercury adsorption. Direct output from the sensor is electric voltage. It takes an additional procedure to convert voltage to mercury concentration. This type of sensor is improved by introducing continuous readout procedure for the voltage–concentration conversion. By using this readout procedure it is possible to monitor mercury vapor concentration as a function of time. Readout is based on the Langmuir time–dependent adsorption theory. This paper illustrates a practical implementation of the new readout procedure.

Copyright information

© Springer-Verlag Berlin Heidelberg 2012

Authors and Affiliations

  • Milija Sarajlić
    • 1
  • Zoran G. Đurić
    • 3
  • Vesna B. Jović
    • 1
  • Srđan P. Petrović
    • 2
  • Dragana S. Đorđević
    • 2
  1. 1.University of Belgrade, IHTM Center for Microelectronic Technologies and Single CrystalBelgradeSerbia
  2. 2.University of Belgrade, IHTM Center for ChemistryBelgradeSerbia
  3. 3.Institute of Technical Sciences of the Serbian Academy of Sciences and ArtsBelgradeSerbia

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