Microsystem Technologies

, Volume 18, Issue 7–8, pp 955–963 | Cite as

Hardware implementation of an electrostatic MEMS-actuator linearization

  • F. MairEmail author
  • M. Egretzberger
  • A. Kugi
Technical Paper


In this paper, an electrostatic actuator linearization will be introduced, which is based on an existing hardware-efficient iterative square root algorithm. The algorithm is solely based on add and shift operations while just needing n/2 iterations for an n bit wide input signal. As a practical example, the nonlinear input transformation will be utilized for the design of the primary mode controller of a capacitive MEMS gyroscope and an implementation of the algorithm will be instantiated in the Verilog hardware description language. Furthermore, an implementation of an improved version of the algorithm will be given reducing the number of needed iterations to n/2 − 1 for an n bit wide input signal while just requiring an acceptable additional amount of hardware resources. Finally, measurement results will validate the feasibility of the presented control concept and its hardware implementation.


Field Programmable Gate Array Hardware Implementation Secondary Oscillator Primary Oscillator Multiplicative Algorithm 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.



This work was funded by the German BMBF as part of the EURIPIDES project RESTLES (project number 16SV3579).


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Copyright information

© Springer-Verlag 2012

Authors and Affiliations

  1. 1.Complex Dynamical Systems Group, Automation and Control InstituteVienna University of TechnologyViennaAustria

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